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Preparation method of graphene-based dual-channel flexible multi-state stress sensor

A sensor, graphene technology, applied in the direction of instruments, measuring force, measuring devices, etc., can solve the problem that the sensor is easily interfered, and achieve the effect of optimizing the stress detection range

Active Publication Date: 2022-05-24
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Used as a wearable sensor for human body signal detection, these two sensors are susceptible to interference when acting alone

Method used

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  • Preparation method of graphene-based dual-channel flexible multi-state stress sensor
  • Preparation method of graphene-based dual-channel flexible multi-state stress sensor
  • Preparation method of graphene-based dual-channel flexible multi-state stress sensor

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Experimental program
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Embodiment Construction

[0019] The present invention will be described in further detail below with reference to the accompanying drawings and embodiments.

[0020] This embodiment provides a graphene dual-channel wearable multi-state stress sensor applied to palm motion monitoring, and the wearable sensor is attached to the mouth of the human body. The specific implementation method is as follows:

[0021] (1) Preparation of PDMS substrate

[0022] Use l-edit to draw a square grid pattern with a line width of 30 μm and a side length of 100 μm for each grid, with a total pattern area of ​​1.5 cm×1.5 cm, and photolithography to obtain a mask for subsequent dry etching. The silicon wafer was dry-etched with an etching depth of 50 μm, and a silicon wafer having a square groove array with a side length of 100 μm and a depth of 50 μm was obtained after removing the glue.

[0023] Mix the epoxy resin structural adhesive (PDMS A adhesive) and the acrylate structural adhesive (PDMS B adhesive) according to...

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Abstract

The invention discloses a preparation method of a flexible substrate graphene material based on surface microstructure, and provides a dual-channel flexible multi-state stress sensor structure, which relates to the structure and preparation of the flexible multi-state stress sensor. The sensor includes: upper and lower flexible substrates, upper and lower sensitive layers, upper and lower electrode layers and packaging structure; the lower flexible substrate and the lower sensitive layer are PDMS substrates with surface microstructure treatment and graphene films formed on their surfaces. Prepared by PDMS inverted mold and brush-coated graphene; the upper electrode layer includes silver electrodes C and their electrode leads, and the lower electrode includes silver electrodes A, B and their electrode leads. The prepared dual-channel sensor is used to realize the simultaneous detection of pressure and stress signals, which can realize the discrimination and judgment of human actions under complex strain conditions including joint bending, external force pressing, and skin stretching. At the same time, by using the graphene material based on the flexible substrate of the surface microstructure, the stress detection range adapted to the sensor is optimized to ensure that the sensor can work normally when the human joints move freely.

Description

technical field [0001] The invention belongs to the field of flexible pressure sensors, in particular to the structure and preparation method of a dual-channel flexible multi-state stress sensor based on surface microstructure flexible substrate graphene. Background technique [0002] With the accelerated pace of life in modern society, people hope to be able to detect their physical conditions more conveniently and closely through technological means. In order to achieve this demand, the research and development of various flexible wearable sensors is essential. Through wearable mechanical sensors, various physiological signals and body movements can be monitored conveniently and continuously, such as pulse, heart rate, joint activity, etc., which can provide effective information for scenarios such as athlete training and rehabilitation of injured patients. Graphene is a good sensitive material, which is non-toxic, easy to fabricate, and has excellent electromechanical pro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/22
CPCG01L1/2287
Inventor 黄文李奕奕龚天巡林媛张晓升
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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