Method for recovering PGMEA from electronic PGMEA waste solvent

A waste solvent and electronic technology, applied in chemical instruments and methods, preparation of organic compounds, separation/purification of carboxylate, etc., can solve the problems of inability to remove waste solvent photoresist, low purity of PGMEA, etc.

Pending Publication Date: 2021-07-06
XINZHONGTIAN ENVIRONMENTAL PROTECTION
View PDF8 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention intends to provide a method for recovering PGMEA from electronic PGMEA waste solvent, to solve the

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for recovering PGMEA from electronic PGMEA waste solvent

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0040] A method for reclaiming PGMEA from electronic PGMEA waste solvent, comprising the following steps:

[0041] Step 1, weight removal

[0042] Pump the electronic PGMEA waste solvent from the top of the vacuum thin film evaporator, and keep the vacuum inside the thin film evaporator at 5-15KPa. The thin-film evaporator is equipped with a steam jacket, and the electronic PGMEA waste solvent is heated by passing 0.6-0.8MPa steam into the steam jacket. The electronic PGMEA waste solvent will separate the waste solvent gas phase during the heating process, while the photoresist, metal metal salt and other soluble solid impurities in the electronic PGMEA waste solvent will remain in the thin film evaporator.

[0043] A gas phase tube is installed on the top of the thin film evaporator, and the generated waste solvent gas phase is introduced into the condenser, and after condensation, the PGMEA semi-finished product is formed (keep the condensed PGMEA semi-finished product at 6...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention belongs to the technical field of carboxylic ester extraction, and discloses a method for recovering PGMEA from an electronic PGMEA waste solvent. The method comprises the following steps: firstly, introducing the waste solvent into a film evaporator, heating by using steam to generate a waste solvent gas phase, introducing the waste solvent gas phase into a condenser, condensing to form a PGMEA semi-finished product, and introducing the PGMEA semi-finished product into a solvent receiving intermediate tank; introducing the PGMEA semi-finished product into a rectifying tower, and keeping the tower top pressure of the rectifying tower at 5-15 KPa, the tower top temperature of the rectifying tower at 48-52 DEG C, the tower kettle temperature of the rectifying tower at 85-89 DEG C, and the temperature of the side line of the rectifying tower at 82-86 DEG C; and finally, extracting PGMEA from the side line of the rectifying tower. According to the invention, the problem that the purity of the recovered PGMEA is low because the photoresist in the waste solvent cannot be removed in the prior art is solved.

Description

technical field [0001] The invention belongs to the technical field of carboxylate extraction, in particular to a method for recovering PGMEA from electronic PGMEA waste solvents. Background technique [0002] PGMEA (Propylene Glycol Methyl Ether Acetate) is a common electronic chemical mainly used in modern integrated circuit (IC) industry and flat panel display (FDP) industry. Electronic grade PGMEA is mainly used in photoresist preparation solvents and photoresist strippers, and sometimes also used as cleaning agents for integrated circuits. In the integrated circuit (IC) industry and the flat panel display (FDP) industry, more waste solvents will be produced, and more PGMEA will remain in the waste solvents. If the waste solvents are directly processed, it will lead to waste of resources. [0003] In order to extract the PGMEA in the waste solvent, the Chinese patent No. 201910433219.3 discloses a method for recovering and purifying propylene glycol methyl ether acetate...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): C07C67/48C07C67/52C07C67/54C07C69/14
CPCC07C67/48C07C67/52C07C67/54C07C69/14
Inventor 陈国平左姣倾彩霞何睿鸣胡阶卢
Owner XINZHONGTIAN ENVIRONMENTAL PROTECTION
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap