Oxidation method for production of imbricated and half large-size silicon wafer battery
A large-size, silicon-wafer technology, applied in the field of oxidation for the production of shingled and half-chip large-size silicon wafer cells, can solve the problems of high cost of oxidation furnace and inability to meet oxidation requirements.
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Embodiment 1
[0049] Take 210x210mm silicon wafer as an example for illustration.
[0050] An oxidation method for the production of shingled and half-sheet large-scale silicon wafer cells, comprising the following steps,
[0051] Cutting the silicon wafer to be oxidized, dividing the silicon wafer into two to form a half silicon wafer: cutting with a laser, cutting 210x210mm into 210x105mm to form a half silicon wafer 1;
[0052] Plug-in is used to insert the half-chip silicon chip 1 on the quartz boat 2;
[0053] Carry out half-wafer oxidation: When the oxidation furnace is on standby, set the standby temperature from the furnace mouth to the furnace tail, and set the first temperature zone, the second temperature zone, and the third temperature zone in sequence along the furnace mouth to the furnace tail. temperature zone, the fourth temperature zone and the fifth temperature zone, set the temperature in the first temperature zone to 790°C, set the temperature in the second temperature ...
Embodiment 2
[0060] Take 210x210mm silicon wafer as an example for illustration.
[0061] An oxidation method for the production of shingled and half-sheet large-scale silicon wafer cells, comprising the following steps,
[0062] Cutting the silicon wafer to be oxidized, dividing the silicon wafer into two to form a half silicon wafer: cutting with a laser, cutting 210x210mm into 210x105mm to form a half silicon wafer 2;
[0063] Plug-in is used to insert the half-piece of silicon wafer on the quartz boat 3;
[0064] Carry out half-wafer oxidation: When the oxidation furnace is on standby, set the standby temperature from the furnace mouth to the furnace tail, and set the first temperature zone, the second temperature zone, and the third temperature zone in sequence along the furnace mouth to the furnace tail. temperature zone, the fourth temperature zone and the fifth temperature zone, set the temperature in the first temperature zone to 810°C, set the temperature in the second temperatu...
Embodiment 3
[0071] Take 210x210mm silicon wafer as an example for illustration.
[0072] An oxidation method for the production of shingled and half-sheet large-scale silicon wafer cells, comprising the following steps,
[0073] Cutting the silicon wafer to be oxidized, dividing the silicon wafer into two to form a half silicon wafer: cutting with a laser, cutting 210x210mm into 210x105mm to form a half silicon wafer 1;
[0074] Plug-in is used to insert the half-chip silicon chip 1 on the quartz boat 2;
[0075] Carry out half-wafer oxidation: When the oxidation furnace is on standby, set the standby temperature from the furnace mouth to the furnace tail, and set the first temperature zone, the second temperature zone, and the third temperature zone in sequence along the furnace mouth to the furnace tail. temperature zone, the fourth temperature zone and the fifth temperature zone, set the temperature in the first temperature zone to 800°C, set the temperature in the second temperature ...
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