Workpiece stage dynamic performance detection method
A detection method and dynamic performance technology, which is applied in the field of dynamic performance detection of the workpiece table, can solve the problems of inconvenient use, single detection items, and complicated detection methods of the workpiece table, and achieve a wide detection range, high detection accuracy, and remarkable thermal characteristics Effect
Pending Publication Date: 2021-08-03
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology
The workpiece table is composed of two linear motors (X-axis and Y-axis) in an orthogonal combination. The current detection method for the dynamic performance of the workpiece table is complicated, and the detection items are relatively single, which is inconvenient to use.
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Embodiment Construction
[0047] The present invention will be further described below through the examples and accompanying drawings, but the protection scope of the present invention should not be limited by this.
[0048] Such as figure 1As shown, the dynamic performance detection device of the workpiece table includes a blue-ray laser writing module 1, an illumination and imaging module 2, a computer 3, a reflector 4, a blue-anti-red dichroic lens 5, and an anti-red and blue-transparent white light dichroic plane. Sheet 6, writing objective lens 7, red laser ranging module 8, mirror 9, focusing mechanism 10, piezoelectric ceramics 11, test sheet 12, workpiece table 13, controller 14. Blu-ray laser writing module 1 emits blue light writing light through reflector 4, blue-transparent and red-reverse dichroic lens 5, anti-red-blue and white-light dichroic light-splitting flat plate 6, reflector 9, enters writing objective lens 7, and passes through the focusing mechanism 10 Focus the blue light onto ...
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The invention discloses a workpiece stage dynamic performance detection method. A workpiece stage dynamic performance detection device comprises a blue light laser inscribing module, a lighting and imaging module, a computer, a reflecting mirror, a blue-transmitting and red-reflecting dichroic lens, a red-blue-transmitting and white-light-reflecting dichroic light splitting plain film, an inscribing objective lens, a red light laser ranging module, a reflecting mirror, a focusing mechanism, piezoelectric ceramics, a test piece, a workpiece table and a controller. The test piece is placed on the workpiece stage, and blue light is focused on the surface of the test piece through the focusing mechanism. The workpiece stage and the controller are synchronously controlled, and speed, acceleration, straightness, minimum step pitch, reciprocating motion characteristic and perpendicularity detection and repeated positioning precision detection of dynamic characteristics of the workpiece stage are completed. Various dynamic characteristics of the workpiece stage are statically represented, the measurement is convenient, the detection precision is high, and the detection sensitivity is high.
Description
technical field [0001] The invention relates to the field of detecting the dynamic performance of a workpiece table, and relates to a method for detecting the dynamic performance of a workpiece table based on laser patterned exposure photolithography. Background technique [0002] The workpiece table is widely used in scientific research, precision testing, precision manufacturing, 3D printing and other fields because of its high precision, fast speed, large load capacity, long stroke, and long life, as well as the realization of vacuum, aseptic, radiation and other complex Displacement control in the environment. [0003] The workpiece table needs to meet various requirements, so the detection of the workpiece table is very important. The workpiece table is composed of two linear motors (X-axis and Y-axis) in an orthogonal combination. The current detection method for the dynamic performance of the workpiece table is complicated, and the detection items are relatively sing...
Claims
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CPCG01M11/00
Inventor 魏劲松刘星郑金轮高天宇王璐
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI