Three-point achromatic telecentric scanning laser processing objective lens

Abstract

The invention relates to a three-point achromatic telecentric scanning laser processing objective lens with a focal length of 170mm applied to laser processing. An objective lens system comprises a first lens, a second lens, a third lens, a fourth lens and a fifth lens which are sequentially arranged in the incidence direction of 3430nm laser, wherein the first lens is a biconcave lens; the second lens is a meniscus lens, and the curved surface of the second lens faces the emergent direction of light; the third lens is a biconvex lens; the fourth lens is a biconvex lens; and the fifth lens is a biconcave lens. The focal length of the optical system is 110mm, the numerical aperture is 0.18, and the entrance pupil diameter is 20mm. The three-point achromatic telecentric scanning laser processing objective lens provided by the invention can be used for eliminating chromatic aberration of three wavelengths of 635nm, 485nm and 3430nm of a laser processing system, eliminating the interference of chromatic aberration, performing laser processing on a processing area range with a scanning angle of + / -12.5 degrees and a size of 70mm * 70mm, accurately positioning the processing position and ensuring the accuracy and quality of laser processing.

Description

technical field [0001] The invention designs a three-point achromatic telecentric scanning laser processing objective lens for laser processing application. Background technique [0002] With the continuous development of laser processing, the types of media that need to be processed are increasing day by day, and the processed effects are required to be more and more refined, especially some special materials that have different requirements for laser wavelengths. [0003] It is used for ultra-fine marking, special material marking and scribing, etc. It is required that the scribing patterns are clear and accurate. Since the infrared band, especially the mid-infrared and far-infrared laser bands, is invisible to the human eye, the marking can be positioned in real time And monitoring increases the difficulty, and the precise positioning of the workpiece to be processed and the engraving work bring difficulties. [0004] The ensuing chromatic aberration caused by the differ...

AI Technical Summary

Problems solved by technology

[0003] It is used for ultra-fine marking, special material marking and scribing, etc. It is required that the scribing patterns are clear and accurate. Since the infrared band, especially the mid-infrared and far-infrared laser bands, is invisible to the human eye, the marking can be positioned in real time And monitoring increases the difficulty, and the precise positioning of the workpiece position to be processed and the engraving work bring difficulties

[0004] The ensuing chromatic aberration caused by the different wavelengths of the laser positioning system, laser processing system and lighting monitoring feedback system seriously affects the processing accuracy of the laser, making the visual system unable to accurately monitor the infrared laser processing, which seriously affects the Precision and accuracy of machined workpieces

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