Spectral confocal probe accurate alignment device and alignment method

Abstract

The invention discloses a spectral confocal probe accurate alignment device and an alignment method. The accurate alignment device comprises a light source, a dotted target, a collimating objective lens, a beam splitter prism, a cube-corner prism, an imaging objective, an area-array camera, a glued pentaprism, a focusing objective lens, a first spectrum confocal probe, a focusing objective and a second spectrum confocal probe. The focusing objective lens and the collimating objective lens are symmetrically arranged relative to the glued pentaprism, the dotted target and the collimating objective lens form a collimator to form a collimating light path, the glued pentaprism is composed of a pentaprism plated with a semi-reflecting and semi-transmitting film and a 22.5-degree rectangular prism, the light-emitting surface of the pentaprism is plated with the semi-reflecting and semi-transmitting film, the glued surface of the pentaprism is plated with the semi-reflecting and semi-transmitting film, the first spectrum confocal probe is composed of a dispersion lens and a pinhole, and the second spectrum confocal probe is composed of a dispersion lens and a pinhole. The invention provides an alignment device and an alignment method capable of realizing precise alignment of two spectrum confocal probes, and the alignment problem of the two probes can be well solved.

Description

technical field [0001] The invention relates to the technical field of visual inspection, in particular to a precise alignment device and alignment method for a spectral confocal probe. Background technique [0002] With the continuous development of intelligent manufacturing, two-dimensional information can no longer meet the needs of inspection and measurement, and three-dimensional measurement has gradually penetrated into all walks of life. The traditional three-dimensional measurement of triangulation has its limitations, such as low precision, alignment of curved surfaces, pits, Slits, highly reflective surfaces, etc. are less effective. Spectral confocal technology can solve the above problems well due to the design of common optical path for illumination and imaging, and has been more and more widely used. However, the three-dimensional measurement range of the spectral confocal probe is generally not large. When it is necessary to measure a large three-dimensional s...

AI Technical Summary

Problems solved by technology

Then it brings a big problem, that is, how to realize the alignment of the two spectral confocal probes. At present, it is mainly guaranteed by mechanical means. If the upper and lower surfaces of the measured sample are relatively flat, this method can also be used. Realize higher precision measurement, but if the upper and lower surfaces of the sample to be tested change greatly, the error of the measurement result will be large

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