Abnormality diagnosis device and abnormality diagnosis method
A technology for abnormality diagnosis and abnormality, which can be used in the testing of measuring devices, engine functions, machine/structural components, etc., and can solve problems such as vacuum deterioration, stoppage, and semiconductor device damage.
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Embodiment approach 1
[0030] figure 1 It is a functional block diagram of the abnormality diagnosis device according to Embodiment 1 of the present invention. Abnormality diagnosis device 40 according to Embodiment 1 is connected to sensor 30 connected to motor 10 and load 20 . Here, the load 20 corresponds to a component that consumes the energy output from the motor 10, for example, using image 3 On the other hand, a CVD (Chemical Vapor Deposition) chamber described later corresponds to the load 20 .
[0031] The sensor 30 detects a physical quantity that changes according to the state of occurrence of an abnormality in the motor 10 and the load 20 as a measured value. Specific examples of the physical quantities include the current flowing through the motor 10 , the temperature of the motor 10 , and the vibration of the motor 10 .
[0032] The abnormality diagnosis device 40 according to Embodiment 1 is configured to include a physical quantity measurement unit 41 , a characteristic paramete...
Embodiment approach 2
[0105] In Embodiment 1 above, a case was described in which an abnormality diagnosis is performed using an electric current as a physical quantity. On the other hand, in the second embodiment, a case will be described in which an abnormality diagnosis is performed using a time differential value corresponding to a change amount of electric current per unit time as a physical quantity. As a specific example, a case will be described in which abnormality diagnosis based on current measurement is performed on the MOCVD apparatus in the same manner as in the previous first embodiment.
[0106] In Embodiment 2, the time differentiation of the current is performed with respect to the effective value of the current. As in Embodiment 1, as the current effective value I_effective 1 ~I_effective n , the n effective current values I_effective are calculated by the characteristic parameter calculation unit 42 . Regarding the calculated current effective value I_effective, the time di...
Embodiment approach 3
[0113] In Embodiments 1 and 2 above, the case where an abnormality diagnosis is performed using an electric current as a physical quantity has been described in detail. In Embodiment 3, abnormality diagnosis using a plurality of physical quantities will be described. Similar to Embodiments 1 and 2, a case where abnormality diagnosis of a vacuum pump is performed will be described.
[0114] When an abnormality occurs in a vacuum pump, physical quantities other than electric current also change. For example, an increase in deposits on the bearing changes the average value and variance of the current, but the average value and variance related to the vibration of the motor 10 also increase because the deposits impede the rotation of the bearing.
[0115] In addition, due to the increase of deposits, the air flow during the vacuuming process changes, so the variance value of the temperature related to the motor 10 increases, and the vibration of the motor 10 also increases. Furt...
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