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A traveling wave antenna plasma source

A technology of plasma source and traveling wave antenna, which is applied in the field of ion source, can solve the problems of complex process, time-consuming, inconvenient operation, etc., and achieve the effect of fast response, simple structure and easy use

Active Publication Date: 2022-07-15
UNIV OF SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method takes a long time (about 40ms), and the process is complicated and inconvenient to operate

Method used

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  • A traveling wave antenna plasma source
  • A traveling wave antenna plasma source
  • A traveling wave antenna plasma source

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Embodiment Construction

[0042] The present invention will be described in detail below with reference to the accompanying drawings and embodiments.

[0043] figure 1 , figure 2 The traveling wave antenna structure independently designed for the present invention consists of six loop antennas and is placed outside the vacuum chamber. Among them, 1 is a feed antenna, 2-5 are four short-circuit antennas, 6 is an antenna connected to a dummy load, 7 is a 50Ω dummy load, and 8 is a quartz tube. The first antenna on the right is connected to the RF source as the power feeding end, the four antennas in the middle are short-circuited as the coupling end, and the first antenna on the left is connected to the 50Ω dummy load as the absorbing end. like figure 1 , the symbol 1 represents the first antenna, which is the feed antenna; the symbols 2-5 are the four short-circuit antennas in the middle, which are used as coupled RF power antennas; the 6 is connected to the dummy load antenna, which is used as the ...

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Abstract

The invention relates to a traveling wave antenna plasma source, which consists of six loop antennas and is placed outside the vacuum chamber; the first antenna at the front is connected to the radio frequency source as a power feeding end, the four antennas in the middle are short-circuited as coupling ends, and the end antennas are used as coupling ends. Connect a 50Ω dummy load as a sink. The invention can obtain a radio frequency plasma source with high coupling efficiency and low reflection, the coupling efficiency can reach 100%, and the reflected power can be reduced to zero.

Description

technical field [0001] The invention relates to a plasma source, in particular to a traveling wave antenna plasma source. Background technique [0002] Plasma is a multi-particle system composed of positive and negative ions and neutral gases, which is electrically neutral as a whole. Among them, the main purpose of high-temperature plasma research is to realize controlled nuclear fusion and solve the energy problem of mankind in the future. Therefore, methods to efficiently generate plasma sources under laboratory conditions are particularly important. [0003] Plasma under current laboratory conditions is mainly produced by ionizing neutral gases. Usually neutral gas is a non-conductive insulating medium. If two electrodes are placed in the gas, and an appropriate voltage is applied, the gas will be broken down and a huge current will be generated. This gas is applied with a voltage to form a huge current. The phenomenon is called gas discharge. According to the differ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H1/46
CPCH05H1/46
Inventor 李清朱光辉孙玄
Owner UNIV OF SCI & TECH OF CHINA
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