Three-axis gyroscope

Abstract

The invention provides a three-axis gyroscope, which comprises a first driving frame, a second driving frame, an X / Y gyroscope structure, and Z gyroscope structures, whereinthe first driving frame is located on the upper side and can perform resonant motion in the vertical direction along the Y axis; the second driving frame is located on the lower side, is parallel to the first driving frame and is spaced from the first driving frame by a preset distance, and the second driving frame can perform resonant motion in the direction opposite to that of the first driving frame along the Y axis; the X / Y gyroscope structure is connected between the first driving frame and the second driving frame; and the Z gyroscope structures are located on the left side and the right side of the X / Y gyroscope structure, and the Z gyroscope structures are connected with the X / Y gyroscope structure; the X / Y gyroscope structure is driven by the first driving frame and the second driving frame, and the Z gyroscope structure is driven by the X / Y gyroscope structure. Compared with the prior art, the three-axis gyroscope disclosed by the invention is reasonable in structural design, compact in structure, high in integration level, strong in anti-interference capability, and capable of effectively reducing orthogonal errors and improving the detection precision.

Description

【Technical field】 [0001] The invention relates to the technical field of micromechanical systems, in particular to a three-axis gyroscope. 【Background technique】 [0002] Gyroscope is a sensor used to measure angular rate and is one of the core devices of inertial technology. It plays an important role in the fields of modern industrial control, aerospace, national defense and consumer electronics. [0003] The development of gyro can be roughly divided into three stages: [0004] The first stage is the traditional mechanical rotor gyro, which has high precision and plays an irreplaceable role in military strategic weapons such as nuclear submarines and intercontinental strategic missiles. However, it has a large volume, complicated manufacturing process, expensive price, long cycle and It is not suitable for mass production; the second stage is optical detection gyroscope, mainly including laser gyroscope and fiber optic gyroscope, mainly using the Sagnac effect, which has...

AI Technical Summary

Problems solved by technology

In current consumer applications, it is generally a single-chip three-axis gyroscope, which is characterized by drive sharing and a reasonable layout of the X / Y / Z gyro masses. However, the three-axis gyroscope is also faced with large size and low integration High, the problem of large quadrature error

[0006] See Chinese invention patent CN108225295A, which discloses a three-axis gyroscope with tuning fork driving effect. The three-axis gyroscope disclosed in this patent has a cleverly designed steering structure. The left and right mass blocks are used to detect the Y / Z axis angular rate. The block is used to detect the X-axis angular rate, but obviously its integration is not high, and the Y / Z mass blocks share the mass block to easily generate coupling; continue to refer to the Chinese invention patent CN110926445A, which discloses a three-axis MEMS gyroscope, the patent The disclosed micro-gyroscope structure is a shared drive, and its innovation is that the X / Y gyroscope structure is novel in design, and the X / Y-axis gyroscope interacts and is arranged in the middle of the drive frame, and is supported by a central anchor point. The Z-axis gyroscope The gyroscopes are distributed on both sides of the X / Y gyroscope and connected to the middle gyroscope structure

Its overall structure design is novel and reasonable, and its integration is high, but its Z-axis gyroscope is not directly decoupled, so it may face the problems of low sensitivity and large quadrature error

[0007] Therefore, it is urgent to propose a new technical solution to solve the problems of low integration and large orthogonal error of the three-axis gyroscope in the prior art

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