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Machining apparatus

A technology for processing devices and workpieces, which can be applied to grinding devices, metal processing equipment, grinding automatic control devices, etc., and can solve the problems of time-consuming and labor-intensive removal operations

Pending Publication Date: 2021-09-03
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that the removal work takes effort and time

Method used

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  • Machining apparatus
  • Machining apparatus
  • Machining apparatus

Examples

Experimental program
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Embodiment Construction

[0020] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. figure 1 The shown processing device 1 is a grinding device for grinding a workpiece 80 held by a chuck table 30 by a processing unit 16 . The front side (-Y direction side) on the base 10 of the processing device 1 serves as a loading and unloading area 100, which is an area where the workpiece 80 is loaded and unloaded with respect to the chuck table 30. The back side (+Y direction side) of 2 is defined as the processing area 101 where the grinding process of the workpiece 80 held on the chuck table 30 is performed by the processing unit 16 .

[0021] In addition, the processing device of the present invention may have the following structure: two groups of grinding units, a rough grinding unit and a fine grinding unit, are used as processing units, and the chuck table 30 holding the workpiece 80 is held by a rotating turntable. Positioned below each grinding...

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PUM

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Abstract

A machining apparatus is provided by the invention with which an operator can observe the inside of a cassette holding workpieces that have been machined to easily, in short time, recognize whether the workpieces are properly machined or not. The machining apparatus includes a chuck table for holding a workpiece that has a mark; a machining unit grinding a workpiece with a grinding tool or grinding a workpiece with a grinding pad; a cassette stage for placing thereon a cassette for storing a plurality of workpieces therein; a temporary rest table on which the workpieces are temporarily placed; a spinner table holding a workpiece to be cleaned; a robot for delivering the workpiece; a determining section for determining whether a workpiece has been properly machined or has not been properly machined; and a control unit for performing a control process for orienting the mark of the workpiece in a predetermined direction if the determining section determines that the workpiece has been properly processed and storing the workpiece in the cassette, and performing a control process for orienting the mark of the workpiece in a direction different from the predetermined direction if the determining section determines that the workpiece has not been properly processed and storing the workpiece in the cassette.

Description

technical field [0001] The present invention relates to an apparatus for processing workpieces such as semiconductor wafers, and particularly relates to a processing apparatus capable of knowing whether the processed workpieces are normally processed. Background technique [0002] For example, a fully automatic grinding device (for example, refer to Patent Document 1) that grinds a workpiece with a grinding tool to make it thinner has a cassette stage on which a plurality of workpieces are placed one by one. A box that is stored in the shelf portion; a temporary storage table for temporarily storing the workpiece; a chuck table that has a holding surface for holding the workpiece; a grinding unit that uses a grinding tool to hold the workpiece. The workpiece held by the chuck table is ground; the rotary table holds the workpiece to be ground and cleaned; the robot transfers the workpiece from the box to the temporary table or is processed the first transfer mechanism, which...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B37/10B24B37/30B24B37/34B24B37/005B24B55/06B24B49/00B24B49/12B24B7/22H01L21/66
CPCB24B37/10B24B37/30B24B37/34B24B37/345B24B37/005B24B55/06B24B49/00B24B49/12B24B7/228H01L22/12H01L22/20H01L21/67778H01L21/67092H01L21/6704H01L21/67253H01L21/67766H01L21/67271H01L23/544B24B37/04H01L2223/54493B24B7/22B24B5/02B24B5/313B24B51/00H01L21/304H01L21/68707H01L21/68714B24B49/04
Inventor 福士畅之
Owner DISCO CORP