Solar cell and its preparation method, photovoltaic module

Abstract

The application provides a solar cell, a preparation method thereof, and a photovoltaic module, wherein the method includes the following steps: performing texturing on the front surface of the semiconductor substrate to form a textured structure; Depositing and forming a thin film layer; performing a first doping treatment on the thin film layer on the front surface of the semiconductor substrate to form a stacked doped layer and a first oxide layer; etching on the rear surface of the semiconductor substrate; Form a tunneling layer on the rear surface; deposit and form a polysilicon layer on the surface of the tunneling layer, and perform a second doping treatment on the polysilicon layer to form a doped conductive layer and a second oxide layer; remove the first oxide formed on the front surface of the semiconductor substrate layer and a second oxide layer formed on the rear surface; a first passivation layer is formed on the surface of the doped layer; and a second passivation layer is formed on the surface of the doped conductive layer. The solar cell provided by the application can reduce the reflectivity of the front surface of the cell and increase the short-circuit current of the cell.

Description

technical field [0001] The present application relates to the field of photovoltaic technology, in particular, to a solar cell, a preparation method thereof, and a photovoltaic module. Background technique [0002] TOPCon (Tunnel Oxide Passivated Contact) cells rely on the "tunneling effect" to achieve rear surface passivation. The rear surface structure of existing TOPCon cells is a semiconductor substrate, a tunneling layer, and doped conductive materials from the inside to the outside. layer, rear surface passivation layer. Boron diffuses on the front surface of N-type TOPCon cells to form BSG (Boron Silicon Glass borosilicate glass). BSG needs a certain thickness as a mask for phosphorous diffusion on the back. However, when removing borosilicate glass in current solar cells, it is easy to damage the front surface of the substrate. The suede structure greatly increases the reflectivity of the front surface of the solar cell, resulting in a decrease in short-circuit curr...

AI Technical Summary

Problems solved by technology

Boron diffuses on the front surface of N-type TOPCon cells to form BSG (Boron Silicon Glass borosilicate glass). BSG needs a certain thickness as a mask for phosphorous diffusion on the back. However, when removing borosilicate glass in current solar cells, it is easy to damage the front surface of the substrate. The suede structure greatly increases the reflectivity of the front surface of the solar cell, resulting in a decrease in short-circuit current

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