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Texture etching method for single crystalline silicon solar cell

A technology of solar cells and monocrystalline silicon, which is applied in the manufacture of circuits, electrical components, and final products. It can solve the problems of lower production efficiency and production capacity, difficulty in producing uniform suede, and increased defective rate. It is easy to operate, Suitable for large-scale production and low cost

Inactive Publication Date: 2009-05-13
NINGBO ULICA SOLAR SCIENCE & TECHNOLOGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] In the prior art, there are two main methods of making monocrystalline silicon texture. One is the method of bubbling in the textured tank, but the bubbling method is easy to cause fragments of silicon wafers and a large amount of volatilization of the additive isopropanol. Moreover, the corrosion solution is not easy to mix evenly, resulting in an increase in the rate of defective products and a waste of solvent, which increases the production cost and reduces production efficiency and production capacity; the other is to use a circulation pump to distribute the various components in the solution evenly. , and the use of the circulation pump can not drive away the hydrogen generated in the suede production process, because the hydrogen will adhere to the surface of the silicon wafer, so that the etching solution cannot fully contact the silicon surface during the suede production process and form blank spots on the suede surface , affecting the uniformity of the textured surface, in view of the disadvantages of these two methods, it is urgent to find other better methods to prepare the textured surface of monocrystalline silicon solar cells
Chinese application patent publication number is CN1983646A "Preparation method of suede surface of monocrystalline silicon solar cell", adopts piezoelectric converter to realize ultrasonic vibration with a frequency of 170-400kHz to remove hydrogen, and the corrosion solution is sodium hydroxide, but the method ultrasonic vibration The high frequency increases the production cost, and the Si(OH) generated in the reaction cannot be effectively taken away without the use of organic solvents 6 2- , so that the silicon surface is covered by the product, and it is not easy to generate a uniform suede

Method used

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  • Texture etching method for single crystalline silicon solar cell
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] (1) Front chemical pre-cleaning

[0027] 0.5% Na by weight is configured in the ultrasonic tank of the ultrasonic cleaning machine 2 SiO 3 solution, and then put it into the [100] crystal silicon wafer, set Na 2 SiO 3 The temperature of the solution is 50° C., the ultrasonic frequency is 25 kHz, ultrasonic pre-cleaning is performed for 5 minutes, and then the silicon wafer is taken out and rinsed with pure water.

[0028] (2) Suede corrosion process

[0029] Rinse the [100] monocrystalline silicon wafer with pure water, and place it in the ultrasonic tank of an ultrasonic cleaning machine with a power of 1800w and a frequency of 25kHz. The ultrasonic tank of the ultrasonic cleaning machine is placed with 1% by weight A mixed aqueous solution of NaOH and 3% isopropanol by weight, the temperature of the mixed aqueous solution is 78°C, and the ultrasonic time is 30 minutes, then take out the monocrystalline silicon wafer and place it in a 10% aqueous hydrochloric acid ...

Embodiment 2

[0033] (1) Front chemical pre-cleaning

[0034] The concentration is 2wt% Na in the ultrasonic tank of the ultrasonic cleaning machine 2 SiO 3solution, and then placed in the crystal silicon wafer, set Na 2 SiO 3 The temperature of the solution is 50° C., the ultrasonic frequency is 40 kHz, ultrasonic pre-cleaning is performed for 10 min, and then the silicon wafer is taken out and rinsed with pure water.

[0035] (2) Suede corrosion process

[0036] Rinse the [100] crystalline silicon wafer with pure water and place it in the ultrasonic tank of an ultrasonic cleaning machine with a power of 2400w and a frequency of 40kHz. The ultrasonic tank of the ultrasonic cleaning machine is equipped with 2% by weight A mixed aqueous solution of NaOH and 6% isopropanol by weight, the temperature of the mixed aqueous solution is 85°C, and the ultrasonic time is 35 minutes, then take out the single crystal silicon wafer and place it in a 10% aqueous hydrochloric acid solution for 6 min...

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Abstract

The invention discloses a preparation method of a monocrystalline silicon solar cell texture, the process is as follows: a monocrystalline silicon wafer which is rinsed cleanly by pure water after the chemical pre-cleaning in the former step is put in an ultrasonic tank of an ultrasonic cleaning machine with the power of 1,800-2,400w and the frequency of 25-40kHz, mixed water solution with 1 percent-2 percent NaOH and 3 percent-6 percent isopropyl alcohol according to the weight percentage is prepared in the ultrasonic tank, the temperature of the mixed water solution is set to be 75-85 DEG C, the ultrasound time is 30-35min, then the monocrystalline silicon wafer is taken out and put in hydrochloric acid water solution with the volume percentage of 10 percent for soaking for 4-6min, hydrofluoric acid water solution with the volume percentage of 10 percent is further used for soaking for 4-6min after the rinsing, then deionized water is used for cleaning, and drying is finally carried out. The silicon wafer texture prepared by the preparation method is even and low in reflection rate; furthermore, the preparation method reduces the fragmentation rate and improves the production efficiency and the production capacity.

Description

technical field [0001] The invention relates to the technical field of crystalline silicon solar cells, in particular to a method for preparing a textured surface of a single crystal silicon solar cell. Background technique [0002] Crystalline silicon solar cells are cells made of crystalline silicon materials that can convert solar energy into electrical energy. They can be roughly divided into two types: monocrystalline silicon solar cells and polycrystalline silicon solar cells. Crystalline silicon solar cells can convert solar energy into electrical energy without using conventional materials such as oil, natural gas, water, coal, etc., so it is a clean, pollution-free new energy source with long service life and renewable utilization. In recent years, get more and more applications. [0003] Among the crystalline silicon series solar cells, monocrystalline silicon solar cells have the highest conversion efficiency and the most mature technology, and are currently the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18C23F1/24
CPCY02P70/50
Inventor 徐晓群孙励斌李华维殷海亭陈斌甘旭黄岳文唐则祁胡宏勋
Owner NINGBO ULICA SOLAR SCIENCE & TECHNOLOGY CO LTD
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