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Corrosion-resistant insulating mask and manufacturing method thereof

A manufacturing method and mask technology, applied in the field of masks, can solve the problems of mask falling off, affecting the efficiency of netting, and prone to corrosion

Inactive Publication Date: 2021-10-01
江苏高光半导体材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this control method is that the forces on the clamping parts of the multiple jaws of the metal mask will affect each other, and it takes a long time to reach equilibrium, thus affecting the netting efficiency.
[0005] After the mask is stretched, it needs to be used repeatedly in the high-temperature acid-base environment of evaporation and cleaning, and the mask itself is coated with an insulating and anti-corrosion coating, which is not easy to corrode. The welding between the mask and the metal frame Highly susceptible to corrosion, resulting in poor deposition and detachment of the mask from the metal frame

Method used

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  • Corrosion-resistant insulating mask and manufacturing method thereof
  • Corrosion-resistant insulating mask and manufacturing method thereof
  • Corrosion-resistant insulating mask and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] A corrosion-resistant insulating mask, including a mask 1 and a mask metal frame 3, the mask 1 includes a plurality of horizontal bars 7 and a plurality of vertical bars 6; between the horizontal bars 7 and the vertical bars 6 is a positive Cross-relationships and horizontal bars 7 and vertical bars 6 intersect to form a plurality of vapor deposition areas 5, each horizontal bar 7 and each vertical bar 6 are provided with axons 2 at both ends, and the mask plate metal frame 3 is provided with The axon 2 cooperates with the welding groove 4.

[0025] A method for manufacturing a corrosion-resistant insulating mask, comprising the following steps:

[0026] S1, the welding surface of the axon 2 and the welding groove 4 is ultrasonically cleaned with alcohol, and dried with cold wind;

[0027] S2, using arc spraying to spray the welding surface to form a layer of metal film;

[0028] S3, sandblasting and roughening the metal film;

[0029] S4, take by weighing 114g of ni...

Embodiment 2

[0033] A corrosion-resistant insulating mask, including a mask 1 and a mask metal frame 3, the mask 1 includes a plurality of horizontal bars 7 and a plurality of vertical bars 6; between the horizontal bars 7 and the vertical bars 6 is a positive Cross-relationships and horizontal bars 7 and vertical bars 6 intersect to form a plurality of vapor deposition areas 5, each horizontal bar 7 and each vertical bar 6 are provided with axons 2 at both ends, and the mask plate metal frame 3 is provided with The axon 2 cooperates with the welding groove 4.

[0034] A method for manufacturing a corrosion-resistant insulating mask, comprising the above-mentioned axon 2 and the welding groove 4, comprising the following steps:

[0035] S1, the welding surface of the axon 2 and the welding groove 4 is ultrasonically cleaned with alcohol, and dried with cold wind;

[0036] S2, using arc spraying to spray the welding surface to form a layer of metal film;

[0037] S3, sandblasting and roug...

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Abstract

A corrosion-resistant insulating mask plate comprises a mask plate and a mask plate metal frame. The mask plate comprises a plurality of transverse strips and a plurality of longitudinal strips, wherein the transverse strips and the longitudinal strips are in an orthogonal relation and intersect to form a plurality of evaporation areas, axons are arranged at two ends of each transverse strip and two ends of each longitudinal strip, and welding grooves used in cooperation with the axons are formed in the mask metal frame. The orthogonal structure of the transverse strips and the longitudinal strips of the metal mask plate designed by the invention can enable a stretching machine to stretch each axon, and the mask plate with the orthogonal axis structure can enable stretching of the mask plate in each direction to be more uniform, so that the stretching yield of the stretching machine is improved. Anti-corrosion insulating coating is carried out on a welding part of the mask and the metal frame, and the welding part can be prevented from being corroded, so that the situation that after the mask is repeatedly used, the mask falls off, impurities are generated, and the evaporation yield of the mask is affected is prevented.

Description

technical field [0001] The invention belongs to the technical field of mask plates, and in particular relates to a corrosion-resistant insulating mask plate and a manufacturing method thereof. Background technique [0002] OLED display technology is a new and vigorously developing display technology in the world, especially the vacuum evaporation process in the production process of OLED panels, which is the core of the entire OLED process and the bottleneck of current technological development. [0003] In the process of producing OLED displays, multi-layer metal materials, inorganic materials or organic materials need to be deposited layer by layer on the glass substrate by evaporation. In the evaporation process, the metal mask is used to cover the glass substrate to be evaporated to form a specific pattern. The metal mask can be divided into common metal mask (Common Metal Mask, abbreviation: CMM) and high-precision Fine Metal Mask (abbreviation: FMM) is used for deposi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24C23C4/131C23C4/06C23C4/129H01L21/32H01L27/32
CPCC23C14/042C23C14/24C23C4/131C23C4/06C23C4/129H01L21/32H10K59/12
Inventor 钱超杨波
Owner 江苏高光半导体材料有限公司
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