A floating non-contact ultrasonically enhanced flexible sub-aperture polishing device and method

Abstract

The invention discloses a floating non-contact ultrasonically enhanced flexible sub-aperture polishing device and method; through the linkage control of the X-axis motion platform, the Y-axis motion platform, the Z-axis motion platform, and the workpiece swing table, it is ensured that the position of the processing point is in line with the normal line of the tool. The normal of the workpiece maintains the same angle to realize sub-aperture machining; the air pressure of the ventilated spindle acts on the inner end surface of the ball spline shaft to form an axial thrust to realize the free floating of the tool in the axial direction; the rotation of the flexible tool will drive the polishing liquid to form a fluid Dynamic pressure, air pressure and dynamic pressure dynamic balance; dynamic pressure makes the flexible tool elastically deform, forming a small gap between the tool and the workpiece, using the shear force generated when the polishing fluid flows through the gap to remove the material; and through the transducer to generate The ultrasonic wave passes through the flexible tool to form a cavitation effect in the gap, which speeds up material removal and improves polishing efficiency.

Description

technical field [0001] The invention belongs to the field of ultra-precision machining, and in particular relates to a floating non-contact ultrasonic-enhanced flexible sub-aperture polishing device and method. Background technique [0002] With the development of aerospace, optics, semiconductor and other fields, the demand for aspheric lenses is increasing. However, traditional processing methods are mainly used to process flat lenses. High precision requirements are not sufficient; [0003] The traditional machining method requires hard contact between the tool and the workpiece, which leads to the inability of the tool to track the surface shape of the workpiece when machining complex surface workpieces, resulting in the machining results being far from the ideal surface shape; some scholars have proposed flexible tool research for this purpose. In the method of throwing the workpiece, the tool can be close to the surface of the workpiece according to the surface curvat...

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Problems solved by technology

[0002] With the development of aerospace, optics, semiconductor and other fields, the demand for aspheric lenses is increasing. However, traditional processing methods are mainly used for processing flat lenses. Factors such as high precision requirements are not competent;

[0003] The traditional processing method requires hard contact between the tool and the workpiece, which leads to the inability of the tool to track the surface shape of the workpiece when processing a complex surface shape workpiece, resulting in a far difference between the processing result and the ideal surface shape; In the method of polishing the workpiece, the tool can be close to the surface of the workpiece according to the curvature of the workpiece, but this leads to the fact that the free abrasive particles cannot enter the gap between the tool and the workpiece, and the abrasive particles on the flexible tool are caused by the deformation of the tool. The contact force of the workpiece is not enough to remove the material efficiently; on this basis, some scholars have proposed an air flotation method to let the flexible tool leave the surface of the workpiece and remove the material through the dynamic pressure shearing action of the free abrasive particles. Although this method can be effective Material removal, but due to the low efficiency of material removal, it still needs to be improved;

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