Floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method

Abstract

The invention discloses a floating non-contact type ultrasonic enhanced flexible sub-aperture polishing device and method. Through linkage control of an X-axis motion platform, a Y-axis motion platform, a Z-axis motion platform and a workpiece swing table, it is guaranteed that the tool normal and the workpiece normal at the position of a machining point are kept at the same angle, and sub-aperture machining is achieved; air pressure of a ventilation main shaft acts on the inner end face of a ball spline shaft to form axial thrust, and a tool freely floats in the axial direction; the flexible tool rotates to drive a polishing solution to form fluid dynamic pressure, and the air pressure and the dynamic pressure are dynamically balanced; the dynamic pressure enables the flexible tool to generate elastic deformation, a tiny gap is formed between the tool and a workpiece, and a material is removed through shearing force generated when the polishing solution flows through the gap; and ultrasonic waves generated by a transducer penetrate through the flexible tool to form a cavitation effect in the gap, so that material removal is accelerated, and the polishing efficiency is improved.

Description

technical field [0001] The invention belongs to the field of ultra-precision machining, and in particular relates to a floating non-contact ultrasonically enhanced flexible sub-aperture polishing device and method. Background technique [0002] With the development of aerospace, optics, semiconductor and other fields, the demand for aspheric lenses is increasing. However, traditional processing methods are mainly used for processing flat lenses. Factors such as high precision requirements are not competent; [0003] The traditional processing method requires hard contact between the tool and the workpiece, which leads to the inability of the tool to track the surface shape of the workpiece when processing a complex surface shape workpiece, resulting in a far difference between the processing result and the ideal surface shape; In the method of polishing the workpiece, the tool can be close to the surface of the workpiece according to the curvature of the workpiece, but this...

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Problems solved by technology

[0002] With the development of aerospace, optics, semiconductor and other fields, the demand for aspheric lenses is increasing. However, traditional processing methods are mainly used for processing flat lenses. Factors such as high precision requirements are not competent;

[0003] The traditional processing method requires hard contact between the tool and the workpiece, which leads to the inability of the tool to track the surface shape of the workpiece when processing a complex surface shape workpiece, resulting in a far difference between the processing result and the ideal surface shape; In the method of polishing the workpiece, the tool can be close to the surface of the workpiece according to the curvature of the workpiece, but this leads to the fact that the free abrasive particles cannot enter the gap between the tool and the workpiece, and the abrasive particles on the flexible tool are caused by the deformation of the tool. The contact force of the workpiece is not enough to remove the material efficiently; on this basis, some scholars have proposed an air flotation method to let the flexible tool leave the surface of the workpiece and remove the material through the dynamic pressure shearing action of the free abrasive particles. Although this method can be effective Material removal, but due to the low efficiency of material removal, it still needs to be improved;

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