A kind of corrosion liquid and method for small hole corrosion of infrared detector

Abstract

The invention provides a corrosion solution for small hole corrosion of an infrared detector, which includes water as a solvent and a solute dissolved in the water, the solute including hydrochloric acid, acetic acid and zinc chloride. In addition, the present invention also provides an infrared detector pinhole corrosion method, including depositing a zinc sulfide layer on the substrate sacrificial layer as an anti-reflection film; depositing an amorphous silicon layer on the zinc sulfide layer as an infrared transmission layer and sulfide The hard mask of zinc wet etching; the amorphous silicon layer is subjected to photolithography, dry etching and stripping to obtain the release hole precursor; the above etching solution is used to perform monolithic wet etching on the zinc sulfide layer to obtain the obtained small holes required. The invention uses hydrochloric acid as the corrosive agent, and introduces water, acetic acid and zinc chloride into the hydrochloric acid as the diluent, buffer and protective agent, respectively, which effectively avoids the floating phenomenon in the wet corrosion process of zinc sulfide, and significantly improves the corrosion resistance of zinc sulfide. The problem of serious lateral undercutting solves the problem of wet corrosion of micro-sized holes.

Description

Corrosion solution and method for small hole corrosion of infrared detectors technical field The invention belongs to infrared detector manufacturing technical field, be specifically related to a kind of infrared detector pinhole corrosion Corrosive fluid and method. Background technique [0002] The working principle of the infrared detector is to convert the heat signal generated by the infrared radiation of the heat sensitive material into an electrical signal. Big The air environment is transparent to infrared rays of 3-5 μm and 8-14 μm. The infrared detectors made with these two bands can be used in At night or in rain, snow, sand, fog and other weather, the object to be monitored can be clearly observed. It is precisely because of this infrared radiation. Features, infrared detectors are widely used in military and civilian fields. [0003] Infrared detectors are MEMS devices, including many small holes and micro-bridges, in order to maximize the performance of ...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the existing problems of small hole wet corrosion of existing infrared detectors, which are prone to floating glue phenomenon, destroying the pattern structure, and serious lateral undercutting

Images