Corrosive liquid and method for corroding pinholes of infrared detector

A technology of infrared detectors and corrosive liquids, applied in chemical instruments and methods, processes for producing decorative surface effects, surface etching compositions, etc., can solve the problems of destroying graphic structures and floating glue, so as to avoid floating glue , Improve the effect of corrosion too fast and good small hole morphology

Active Publication Date: 2021-11-09
WUHAN GAOXIN TECH
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  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the existing problems of small hole wet corrosion of existing infra

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  • Corrosive liquid and method for corroding pinholes of infrared detector
  • Corrosive liquid and method for corroding pinholes of infrared detector
  • Corrosive liquid and method for corroding pinholes of infrared detector

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[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0032] In describing the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", The orientations or positional relationships indicated by "top", "bottom", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than in...

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Abstract

The invention provides a corrosive liquid for corroding pinholes of an infrared detector, which comprises water as a solvent and solutes dissolved in the water and comprising hydrochloric acid, acetic acid and zinc chloride. In addition, the invention also provides an infrared detector pinhole corrosion method, which comprises the following steps of: depositing a zinc sulfide layer as an anti-reflection film on a sacrificial layer of a substrate; depositing an amorphous silicon layer on the zinc sulfide layer as a hard mask for wet etching of an infrared transmission layer and zinc sulfide; performing photoetching, dry etching and photoresist removal on the amorphous silicon layer to obtain a release hole precursor; and carrying out single-chip wet etching on the zinc sulfide layer by using the corrosive liquid to obtain required pinholes. According to the method, hydrochloric acid is used as a corrosive agent, and water, acetic acid and zinc chloride are introduced into hydrochloric acid as a diluent, a buffering agent and a protective agent respectively, so that the phenomenon of floating glue in the wet corrosion process of zinc sulfide is effectively avoided, the problem of serious lateral undercutting of zinc sulfide is remarkably improved, and the problem of wet etching of micro-sized holes is solved.

Description

technical field [0001] The invention belongs to the technical field of infrared detector manufacturing, and in particular relates to a corrosion solution and a method for corroding small holes of infrared detectors. Background technique [0002] The working principle of the infrared detector is to convert the heat signal generated by the infrared radiation of the heat-sensitive material into an electrical signal. The atmospheric environment is transparent to infrared rays of 3-5μm and 8-14μm. Infrared detectors made using these two bands can clearly observe the monitoring objects at night or in rain, snow, dust, fog and other weather. It is precisely because of this characteristic of infrared radiation that infrared detectors are widely used in military and civilian fields. [0003] Infrared detectors are MEMS devices, which contain many small holes and micro bridges. In order to make the detectors perform best and protect these tiny structures, infrared detectors must be p...

Claims

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Application Information

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IPC IPC(8): C09K13/04B81C1/00
CPCC09K13/04B81C1/00539Y02P70/50
Inventor 黄立李胜利马占锋高健飞黄晟罗学强
Owner WUHAN GAOXIN TECH
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