Energy-saving and environment-friendly annealing furnace

An energy saving, environmental protection, annealing furnace technology, applied in the field of photovoltaics, can solve the problems of inability to adjust semiconductor wafers, fixed shape and size, energy waste, etc., and achieve the effects of good popularization practicability, energy saving, and simple modification methods.

Active Publication Date: 2021-11-09
徐州中辉光伏科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing energy-saving annealing furnace basically adopts fiber structure, and the shape and size of the inner cavity are fixed, which cannot be adjusted for the processed semiconductor wafer
When the processed quantity is small, in order to ensure the annealing quality, it is still necessary to ensure that the annealing furnace operates at the rated power, resulting in a waste of energy

Method used

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Embodiment Construction

[0022] The technical solutions provided by the present invention will be described in detail below in conjunction with specific examples. It should be understood that the following specific embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention.

[0023] Such as figure 1 Shown is a schematic structural diagram of the present invention, which is an energy-saving and environment-friendly annealing furnace, comprising an annealing furnace body 1 and an adjustable inner wall cover plate 2 installed inside the annealing furnace body 1 .

[0024] The number of inner wall cover plates 2 is two, and the ends of the two inner wall cover plates 2 that are close to each other are installed on the top of the furnace body wall along the depth direction of the annealing furnace body 1, and the ends that are far away from each other are installed on the annealing furnace through the adjustment piece 3 On the furnace inne...

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Abstract

The invention provides an energy-saving and environment-friendly annealing furnace. The energy-saving and environment-friendly annealing furnace comprises an annealing furnace body and an adjustable inner wall cover plate mounted in the annealing furnace body. According to the annealing furnace with the adjustable inner cavity, adjustment can be conducted according to the number of semiconductor wafers machined inside, the annealing quality is guaranteed, meanwhile, the annealing furnace operates at the power lower than the rated power, and energy is saved; an innovative adjusting piece is arranged, the inner wall cover plate can be adjusted and fixed at different angles through cooperation of magnetism generated by electricity to magnetism and the dead weight of the inner wall cover plate, and the adjusting mode is more flexible and accurate; and the annealing furnace can be directly modified on the basis of an existing annealing furnace, the modification method is simple, the modification cost is low, and good popularization practicability is achieved.

Description

technical field [0001] The invention belongs to the technical field of photovoltaics, and in particular relates to an energy-saving and environment-friendly annealing furnace. Background technique [0002] Photovoltaic modules are the key components of photovoltaic technology. Photovoltaic modules convert sunlight into electrical energy through the photovoltaic effect. The basic structure of a photovoltaic module is a photosensitive diode, which is fabricated on semiconductor materials through microelectronics technology. The annealing furnace is a key equipment used in the manufacture of semiconductor devices, which affects the electrical properties of semiconductor wafers by heating them. [0003] The existing energy-saving annealing furnace basically adopts a fiber structure, and the shape and size of the inner cavity are fixed, which cannot be adjusted for the processed semiconductor wafer. When the processed quantity is small, in order to ensure the annealing quality,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F27B17/00H01L31/18
CPCF27B17/0025H01L31/1864Y02P70/50
Inventor 王大威赵钊辉
Owner 徐州中辉光伏科技有限公司
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