Energy-saving and environment-friendly annealing furnace

Abstract

The invention provides an energy-saving and environment-friendly annealing furnace. The energy-saving and environment-friendly annealing furnace comprises an annealing furnace body and an adjustable inner wall cover plate mounted in the annealing furnace body. According to the annealing furnace with the adjustable inner cavity, adjustment can be conducted according to the number of semiconductor wafers machined inside, the annealing quality is guaranteed, meanwhile, the annealing furnace operates at the power lower than the rated power, and energy is saved; an innovative adjusting piece is arranged, the inner wall cover plate can be adjusted and fixed at different angles through cooperation of magnetism generated by electricity to magnetism and the dead weight of the inner wall cover plate, and the adjusting mode is more flexible and accurate; and the annealing furnace can be directly modified on the basis of an existing annealing furnace, the modification method is simple, the modification cost is low, and good popularization practicability is achieved.

Description

technical field [0001] The invention belongs to the technical field of photovoltaics, and in particular relates to an energy-saving and environment-friendly annealing furnace. Background technique [0002] Photovoltaic modules are the key components of photovoltaic technology. Photovoltaic modules convert sunlight into electrical energy through the photovoltaic effect. The basic structure of a photovoltaic module is a photosensitive diode, which is fabricated on semiconductor materials through microelectronics technology. The annealing furnace is a key equipment used in the manufacture of semiconductor devices, which affects the electrical properties of semiconductor wafers by heating them. [0003] The existing energy-saving annealing furnace basically adopts a fiber structure, and the shape and size of the inner cavity are fixed, which cannot be adjusted for the processed semiconductor wafer. When the processed quantity is small, in order to ensure the annealing quality,...

AI Technical Summary

Problems solved by technology

[0003] The existing energy-saving annealing furnace basically adopts fiber structure, and the shape and size of the inner cavity are fixed, which cannot be adjusted for the processed semiconductor wafer

When the processed quantity is small, in order to ensure the annealing quality, it is still necessary to ensure that the annealing furnace operates at the rated power, resulting in a waste of energy

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