Surface acoustic wave electric field sensing device based on piezoelectric effect

Abstract

A surface acoustic wave electric field sensing device based on a piezoelectric effect comprises a piezoelectric material, a vibration excitation area at one end of the piezoelectric material is provided with a vibration excitation electrode, a vibration pickup area at the other end of the piezoelectric material is provided with a vibration pickup electrode, and an area between the vibration excitation area and the vibration pickup area of the piezoelectric material is a propagation area; the anode of the excitation electrode is connected with the excitation source and the cathode is grounded; the positive electrode of the vibration pick-up electrode is connected with the signal processing circuit and the negative electrode is grounded; the excitation electrode and the vibration pick-up electrode are respectively composed of two groups of interdigital electrodes; and when the sensor is arranged in a measured electric field, the piezoelectric material deforms, so that the propagation speed or frequency of the surface acoustic wave is changed, the signal received by the vibration pick-up electrode is changed, and the signal processing circuit processes the signal, so that the measurement of the electric field can be realized. The device is wide in electric field measurement range, high in sensitivity, small in size, low in cost, easy to prepare and suitable for electric field measurement in a power grid and equipment.

Description

technical field [0001] The invention relates to the field of electric field measurement, in particular to a surface acoustic wave electric field sensor device based on piezoelectric effect. Background technique [0002] The real-time measurement of information in the power grid is of great significance for system operation status monitoring, fault prediction, fault diagnosis and equipment status monitoring. In the power grid, the significance of the voltage signal is very important. The fingerprint characteristics of the voltage contain a lot of information. Through the measurement of the voltage, the monitoring of the steady state information of the power grid and the extraction of the transient signal can be realized, so as to provide the operation basis for the power grid control terminal and improve the safety and reliability of the power grid. The traditional voltage measurement method uses transformers for measurement. This kind of measurement equipment is bulky and h...

AI Technical Summary

Problems solved by technology

However, this type of sensor is limited by electro-optic crystals, poor temperature stability, and expensive equipment

The MEMS electric field sensor uses the principle of electrostatic induction to measure the electric field. The sensor is small in size and low in cost, but this measurement method has poor frequency response and high power consumption.

Images