Intelligent control method and system for polishing equipment
An equipment and rough polishing technology, applied in the field of intelligent control method and system of polishing equipment, can solve problems such as the increase of polishing defect rate, etc., and achieve the effect of improving polishing yield
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Embodiment 1
[0030] like figure 1 As shown, the embodiment of the present application provides an intelligent control method for polishing equipment, wherein the method is applied to an intelligent parameter control system, and the system is communicatively connected with a first image acquisition device and a first size determination device , the method includes:
[0031] Step S100: obtaining first size information of the first product to be polished by the first size measuring device;
[0032] Specifically, the intelligent parameter control system is a system for joint intelligent distribution of rough polishing and fine polishing parameters, and the first image acquisition device is a device that can perform image acquisition. Generally speaking, the device is an optical An image capturing instrument, such as a CCD camera, the first size measuring device is a device that can perform size measurement. According to the difficulty of the measured size, accuracy requirements, etc., the fir...
Embodiment 2
[0084] Based on the same inventive concept as the intelligent control method for polishing equipment in the foregoing embodiment, the present invention also provides an intelligent control system for polishing equipment, such as Figure 8 As shown, the system includes:
[0085] a first obtaining unit 11, the first obtaining unit 11 is configured to obtain first size information of the first product to be polished through a first size measuring device;
[0086] a second obtaining unit 12, the second obtaining unit 12 is configured to obtain the first standard size information;
[0087] a third obtaining unit 13, the third obtaining unit 13 is configured to obtain the first polishing surface requirement information, and use the first polishing surface requirement information as supervision data;
[0088] The fourth obtaining unit 14 is configured to input the first size information, the first standard size information and the first polishing surface requirement information into...
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