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Method for cleaning surface of hollow electrodes in air-tight sealing thyratron

A hollow electrode and thyratron technology is applied in the field of cleaning the surface of hollow electrodes in a hermetically sealed thyratron tube, which can solve problems such as affecting the high-pressure stability performance of the aging and working process, and the surface state cannot meet the requirements of high standard use.

Pending Publication Date: 2021-12-03
昆山国力大功率器件工业技术研究院有限公司 +1
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The hollow electrode processed with tungsten-molybdenum material is a refractory tungsten-molybdenum material, and its surface state cannot meet the high standard requirements after chemical treatment.
The tungsten and molybdenum material is formed by powder metallurgy, and the hollow electrode is electrochemically or chemically polished to assemble and weld the surface of the electrode, especially in the groove of the electrode and the fine convex and concave holes on the edge of the groove, there will be carbon-containing organic matter and attached fine metal particles, cold and high pressure for a long time It is also difficult to achieve good results for aging, which seriously affects the high-voltage stability of aging and working processes

Method used

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Embodiment Construction

[0030] A preferred embodiment of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0031] refer to Figure 1-3 , for the airtight thyratron to be cleaned in the present invention, comprising a ceramic insulating case 1 and two parallel and spaced first hollow electrodes 2 and a second hollow electrode 3 arranged therein, the first hollow electrode 2 of the first hollow electrode An electrode plate 21 and the second electrode plate 31 of the second hollow electrode are arranged oppositely, and the first electrode plate 21 and the second electrode plate 31 are respectively provided with through-hole grooves 4, and the through-hole grooves can be circular, strip-shaped or other shapes.

[0032] A cleaning method for cleaning the surface of the above-mentioned hermetically sealed thyratron hollow electrode, comprising the following steps:

[0033] Step 1: Connect the hermetically sealed thyratron into a device for high-tempe...

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Abstract

The invention discloses a method for cleaning the surface of hollow electrodes in an air-tight sealing thyratron. The method comprises the following steps of: firstly, connecting the air-tight sealing thyratron into a device for baking the hollow electrodes of the air-tight sealing thyratron at high temperature, a first vacuum system for vacuumizing each component in the air-tight sealing thyratron and a second vacuum system for vacuumizing the external space of the air-tight sealing thyratron, connecting the first hollow electrode and the second hollow electrode to the positive electrode and the negative electrode of a power supply respectively, starting the first vacuum system, performing high-temperature baking, starting the second vacuum system, cooling, introducing purified hydrogen for ion cleaning, and replacing the positive electrode and the negative electrode of the power supply for cleaning the other electrode. The method is convenient to operate, residual pollutants on the surface of an anode can be thoroughly removed, a thyratron exhaust system can be shared, plasma cleaning equipment does not need to be independently used, only a movable direct-current power source needs to be independently provided, and therefore plasma cleaning is achieved at low cost.

Description

technical field [0001] The invention relates to a method for cleaning the surface of a hollow electrode, in particular to a method for cleaning the surface of a hollow electrode in a hermetically sealed thyratron. Background technique [0002] The anode and grid of the hollow thyratron are subjected to electron bombardment during the working process, and the instantaneous power reaches the order of hundreds of megawatts. The materials selected are tungsten and molybdenum with high melting points and resistance to splashing. The hollow electrode processed with tungsten-molybdenum material is a refractory tungsten-molybdenum material, and its surface state cannot meet the high standard requirements after chemical treatment. The tungsten and molybdenum material is formed by powder metallurgy, and the hollow electrode is electrochemically or chemically polished to assemble and weld the surface of the electrode, especially in the groove of the electrode and the fine convex and co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23G5/00
CPCC23G5/00
Inventor 黄俊杰上官靖斌李明睿高杰高大庆梁桂铭李永明邹建军王少哲唐勇金雪剑
Owner 昆山国力大功率器件工业技术研究院有限公司
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