Efficient equipment based on microwave nonlinear device
A non-linear device and non-linear load technology, applied in the field of plasma equipment, can solve problems such as large insertion loss of matching circuits, complex matching circuit structures, and reduced energy efficiency.
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Embodiment 1
[0038] Such as figure 1 with figure 2 shown.
[0039] A high-efficiency device based on a microwave nonlinear device includes a microwave source 1, a regulating circuit 2, and a nonlinear device 3 connected in sequence. The regulating circuit 2 and the nonlinear device 3 constitute a nonlinear load, and the port of the nonlinear load connected to the microwave source 1 is an input end. The non-linear load has two states, a small signal state and a large signal state. The adjustment circuit 2 includes at least one adjustment body 21 , a first coupling structure 21A located at the front end of the adjustment body 21 and a second coupling structure 21B located at the rear end of the adjustment body 21 . When the signal is small, the first coupling structure 21A, the second coupling structure 21B, and the adjustment body 21 between the first coupling structure 21A and the second coupling structure 21B together form a first resonant cavity, and the The resonant frequency of at...
Embodiment 2
[0047] Such as figure 2 shown.
[0048] Compared with implementation example 1, the only difference is:
[0049] Both the first coupling structure 21A and the second coupling structure 21B are metal diaphragms. In the broadside direction of the rectangular waveguide, the size of the through hole is less than 1 / 3 of the size of the metal film.
Embodiment 3
[0051] Such as image 3 shown.
[0052] Compared with implementation example 2, the nonlinear device includes a one-to-four equal-amplitude and equal-phase power divider and a nonlinear sub-device respectively connected to its four output terminals.
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