Ritchey-Common detection method and system based on virtual interferometer method

Abstract

The invention discloses a Ritchey-Common detection method and system based on a virtual interferometer method, which can conveniently and quickly realize high-precision calculation of a surface shape to be detected, reduce the requirement on the area of a test site and effectively inhibit interpolation errors in a coordinate transformation method. The method comprises the following steps: measuring various parameters in a Ritchey-Common detection light path, and constructing a virtual interferometer in optical design software; performing Zernike fitting on the actually measured system wave aberration introduced by the plane mirror to obtain each Zernike coefficient of the system wave aberration; taking each Zernike coefficient of the system wave aberration as an optimization target of the system, taking the Zernike coefficient of the surface shape of the plane mirror to be measured as an optimization variable, and performing optimization by utilizing an optimization function of optical design software until the system wave aberration obtained by the virtual interferometer is consistent with the system wave aberration obtained by actual measurement; extracting each Zernike coefficient of the mirror surface to be measured, and generating a to-be-measured surface shape S1 (x, y) to be measured containing an adjustment defocus error; performing optimization by taking the out-of-focus item Zernike coefficient in the system wave aberration as an optimization target; and obtaining a to-be-measured surface shape S0 (x, y).

Description

technical field [0001] The invention relates to the technical field of optical surface shape detection, in particular to a Ricky-Common detection method based on a virtual interferometer method, and also to a Ricky-Common detection system based on a virtual interferometer method. Background technique [0002] Optical interference is an efficient optical surface shape detection method, which can accurately reflect the surface shape quality, and plays an important role in the production, processing and detection of optical components. With the continuous development of astronomical optics, the demand for large-aperture optical flat mirrors (>1000mm) is gradually increasing, while the caliber of traditional commercial interferometers is mostly between 100mm and 150mm, and it is difficult to measure them with full aperture. The Ricky-Common method can better realize the full-aperture measurement of large-diameter flat mirrors. During the detection process, a spherical mirror ...

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Problems solved by technology

However, in the actual measurement, the measurement site is limited, and it is impossible to build a long enough test optical path to ensure that the algorithm requires a large enough F / #; moreover, the longer optical path has more stringent requirements on the experimental environment, and the airflow and vibration are uncontrollable. Factors will bring huge errors to the experimental results; the coordinate transformation method accurately deduces the relationship between the mirror surface shape and the system wave aberration, but its algorithm is complex and requires interpolation operations, thus introducing interpolation errors

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