Temperature field coupled surface acoustic wave resonator calculation method
A surface acoustic wave and calculation method technology, applied in calculation, computer-aided design, instruments, etc., can solve problems such as no coupling, calculation and analysis of surface acoustic wave resonators, etc., and achieve the effect of fast and accurate calculation
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[0053] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0054] as attached figure 1 As shown, a calculation method of a surface acoustic wave resonator coupled with a temperature field includes the following steps:
[0055] Step 1) Coupling the temperature field into the piezoelectric physical field in the form of thermal stress and thermal strain to obtain a mathematical model capable of characterizing the multi-physics coupling of the surface acoustic wave resonator under the action of different temperature fields;
[0056] Step 2) solve the multiphysics coupling mathematical model obtained in step 1) by finite element FEM technology, and obtain the finite element model of the multiphysics surface acoustic wave resonator single-finger structure coupled with the temperature field; as attached figure 2 Shown is a single-finger structure of a surface acoustic wave resonator, including a metal electrode, a p...
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