Flexible sensor with contact and non-contact sensing functions and manufacturing method

Abstract

The invention discloses a flexible sensor with contact and non-contact sensing functions and a manufacturing method. A interdigital electrode layer electrode wire, a top layer piezoresistive electrode layer electrode wire and a bottom layer piezoresistive electrode layer electrode wire are connected with an external circuit board with analog switch on-off selection, and non-contact sensing signals of the interdigital electrode layer and contact sensing signals of the porous piezoresistive material layer are collected in a row-column scanning mode; the capacitance isolation layer isolates electric field signal interference between the interdigital electrode layer and the porous piezoresistive material layer; the manufacturing method comprises the following steps: preparing an aluminum mold and raw materials of the sensor in advance; and preparing the raw materials according to the proportion and filled into an aluminum mold to be heated and cured, and packaging and manufacturing the sensor. According to the invention, the interdigital electrode unit and the porous piezoresistive unit are arranged in a nested manner on the structure, and two detection principles of piezoresistive and capacitive are respectively adopted, so that the coupling between a contact signal and a non-contact signal and the interference between the contact signal and the non-contact signal are reduced, and high detectability, low coupling and high sensitivity of signal acquisition are realized.

Description

technical field [0001] The invention relates to a sensor, in particular to a flexible sensor with contact and non-contact sensing functions and a manufacturing method. Background technique [0002] The increasing demand for robots has greatly promoted the development of the robot industry, and the sharp increase in the number of robots has greatly increased the possibility of people interacting with robots during operations. Integrating the tactile sensing system on the robot and constructing an intelligent robot with tactile sensing capability is conducive to improving the friendliness of the robot-human interaction process and ensuring the safety of the interaction process to a certain extent. [0003] However, in some special applications, not only the robot needs to have the ability of tactile perception, but also needs to have the ability of non-contact perception beyond the ability of tactile perception. For example, in the process of fast work, due to the effect of i...

AI Technical Summary

Problems solved by technology

Existing multifunctional sensors with non-contact sensing and contact sensing capabilities can be roughly divided into two types: multifunctional sensors based on different detection principles. At present, the commonly used combination of principles is triboelectric and piezoresistive. Small, but the detection process has strict requirements on the surface of the detection object; multi-functional sensors based on a single detection principle are usually based on the capacitance detection principle, which is often difficult to balance the detection sensitivity between contact and non-contact

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