Solar cell, preparation method thereof and photovoltaic module
A solar cell and polysilicon layer technology, applied in photovoltaic power generation, electrical components, circuits, etc., can solve the problems of poor passivation effect and short-circuit current reduction, and achieve the effects of reducing absorption, increasing short-circuit current, and improving passivation effect
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[0075] Based on this, the application provides a kind of preparation method of solar cell, such as figure 1 Shown, preparation method comprises the following steps:
[0076] Step S10, doping the front surface of the textured N-type semiconductor substrate to form a P-type emitter;
[0077] Step S20, forming a tunneling layer on the rear surface of the N-type semiconductor substrate;
[0078] Step S30, depositing and forming a first polysilicon layer, an N-type doped amorphous silicon layer and a second polysilicon layer on the surface of the tunneling layer, wherein the second polysilicon layer is located away from the the outermost layer of the tunneling layer;
[0079] Step S40, annealing, so that the doping elements in the N-type doped amorphous silicon layer diffuse to the first polysilicon layer and the second polysilicon layer, forming a composite N-type doped polysilicon layer , the doping concentration of each doped polysilicon layer in the composite N-type doped po...
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