The present application relates to the field of optoelectronic technology, and in particular to a 980nm high-power
semiconductor laser epitaxial
wafer and a preparation method thereof. The epitaxial
wafer comprises, from bottom to top along the growth direction, a GaAs substrate, a GaAs buffer layer, an N-side confinement layer, a first N-side graded-composition
waveguide layer, a second N-side graded-composition
waveguide layer, an N-side
barrier layer, a
quantum well, a P-side
barrier layer, a P-side graded-composition
waveguide layer, a P-side constant-composition waveguide layer, a P-side confinement layer and a GaAs
ohmic contact layer. The present application widens the
optical field to the N side through an asymmetric graded waveguide, reduces the cavity surface light
power density and makes the heat evenly distributed; introduces
tensile strain through a P-containing segmented strain waveguide, increases the
band gap, reduces intrinsic absorption and
free carrier absorption, enhances carrier confinement, suppresses non-radiative recombination and realizes strain compensation; optimizes the
doping distribution to reduce
heat generation. The COMD risk is reduced from the source, and the device reliability is improved.