Spindle structure of vacuum coating equipment

Abstract

The invention provides a main shaft structure of vacuum coating equipment. The main shaft structure comprises a main shaft, a carbon brush, a carbon brush fixing part, a shell, a conductive ring and an insulating ring, the carbon brush fixing part is conductive and is fixed on the outer peripheral surface of the main shaft, a plurality of carbon brushes are elastically arranged on the outer peripheral surface of the carbon brush fixing part, one end of each carbon brush is elastically connected with the outer peripheral surface of the carbon brush fixing part, the other opposite end of each carbon brush is in contact connection with the inner surface of the conductive ring, and the insulating ring is arranged on the outer peripheral surface of the conductive ring. The shell is arranged on the peripheral surface of the insulating ring; a dust collection groove is annularly formed in the bottom of the conducting ring, and a dust collection cavity is formed among the inner surface of the conducting ring, the dust collection groove and the outer surface of the carbon brush fixing piece. Relative motion friction of the spindle and the carbon brush is changed into relative static, so that the problems of burning and scrapping of the spindle caused by ignition due to accumulation of graphite dust on the spindle caused by long-term friction of the spindle and the carbon brush are solved to the greatest extent, and collection and cleaning of the graphite powder and later maintenance are facilitated.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a main shaft structure of vacuum coating equipment. Background technique [0002] In vacuum coating, the machine is in a closed, high-temperature vacuum environment, and the cathode drive equipment drives the target to rotate to cool the inside of the entire target. The weight of the entire target is loaded on the cathode drive equipment, and the cathode drive is installed with Carbon brushes, used to neutralize the high voltage and high current on the target, specifically, as described in the attached figure 1 Shown: The target is loaded on the turret on the original spindle A-1, the original spindle A-1 is connected to the housing A-4 through bearings, and the original carbon brush A-2 is assembled on the carbon brush holder A-3 , The carbon brush holder A-3 is fixed on the carbon brush insulating seat A-5, and the carbon brush insulating seat A-5 is fixed on the housin...

AI Technical Summary

Problems solved by technology

During use, the original carbon brush A-2 and the original spindle A-1 move and rub against each other, which not only causes serious wear of the original carbon brush A-2, but also causes graphite powder to accumulate on the original spindle A-1, which in turn leads to unstable current And there is a sparking phenomenon, and the main shaft will be burned in severe cases

Spindle maintenance and replacement not only consumes manpower and physics, but also takes a long time, resulting in the shutdown of the entire processing line, which greatly affects the production capacity of the processing line

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