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Self-adaptive MEMS electric field sensor and structure thereof

An electric field sensor and self-adaptive technology, applied in the field of sensors, can solve the problems affecting the working performance of sensors, the accuracy of stability measurement, the amplitude of movable structures, and the drift of key sensitivity parameters, so as to achieve stable reference, improve measurement accuracy, and improve The effect of detection accuracy

Active Publication Date: 2022-03-01
BEIJING TFLYING TRANSDUCER TECH CO LTD
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Problems solved by technology

However, MEMS electric field sensors usually work in the resonance state of its movable structure, and its resonance frequency is greatly affected by changes in external factors such as temperature and structural stress, which in turn affects the amplitude of its movable structure, which leads to its sensitivity and other critical The parameters drift, affecting the working performance, stability and measurement accuracy of the sensor

Method used

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  • Self-adaptive MEMS electric field sensor and structure thereof
  • Self-adaptive MEMS electric field sensor and structure thereof
  • Self-adaptive MEMS electric field sensor and structure thereof

Examples

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specific Embodiment 1

[0033] A kind of adaptive MEMS electric field sensor structure of the present application, such as figure 1 As shown, it includes the vibration pickup reference electrode 1, the sensing electrode 2, the driving electrode 3, and the movable ground electrode 4. The movable ground electrode 4 is respectively coupled with the vibration pickup reference electrode 1, the sensing electrode 2, and the driving electrode 3. The vibration pickup reference electrode 1 The part opposite to the movable ground electrode 4 constitutes a capacitor, which is used to detect the vibration of the movable ground electrode 4; The sensing output of the external electric field is generated on the sensing electrode 2; the part of the driving electrode 3 opposite to the movable ground electrode 4 constitutes a driving capacitor, and an excitation signal is applied to the driving electrode 3 to make the movable ground electrode 4 vibrate.

[0034] In this specific embodiment, the movable ground electrode...

specific Embodiment 2

[0056] An adaptive MEMS electric field sensor of the present application, such as Figure 8 As shown, it includes an adaptive MEMS electric field sensor structure and a data processing circuit, and the data processing circuit is connected with the sensing electrode, the driving electrode, and the vibration-pickup reference electrode in the MEMS electric field sensor structure respectively, and is used for detection by the vibration-pickup reference electrode. A reference voltage, an excitation signal is applied through the driving electrodes, and an induced voltage signal of an external electric field is detected through the sensing electrodes. ,

[0057] The data processing circuit includes an excitation source circuit, a clamping circuit, a feedback circuit, a demodulation circuit, and a calculation circuit. The excitation source circuit is connected to the driving electrodes for providing excitation signals to the driving electrodes, which are not shown in the figure; the c...

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Abstract

The invention discloses a self-adaptive MEMS electric field sensor and a structure thereof. The self-adaptive MEMS electric field sensor comprises a movable grounding electrode, at least one vibration pickup reference electrode, at least one induction electrode and at least one driving electrode, a capacitor is formed between the vibration pickup reference electrode and the movable grounding electrode and is used for detecting the vibration condition of the movable grounding electrode; the opposite part of the movable grounding electrode and the sensing electrode forms a shielding electrode of the sensing electrode, and the sensing electrode is used for sensing an external electric field; an excitation signal is applied to the driving electrode, so that the movable grounding electrode is in a resonance state, the outputs of the vibration pickup reference electrode and the induction electrode are detected, and the demodulation induction voltage output by the induction electrode is divided by the demodulation reference voltage output by the vibration pickup reference electrode to obtain an external electric field detection result. By automatically adjusting the excitation signal and correcting the output, self-adaptive adjustment can be carried out according to the change of environment and structure parameters, the compensation for the output drift of the sensor is realized, and the measurement accuracy of the MEMS sensor is greatly improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an adaptive MEMS electric field sensor and its structure. Background technique [0002] As a key component of electric field strength measurement, electric field sensors are widely used in aerospace, smart grid, electrostatic protection, lightning warning, scientific research and many other fields. [0003] In recent years, with the development of MEMS and micro-nano processing technology, the MEMS electric field sensor based on the principle of charge sensing has become a hot research and application direction because of its small size, low cost, easy integration, and batch manufacturing. However, MEMS electric field sensors usually work in the resonance state of its movable structure, and its resonance frequency is greatly affected by changes in external factors such as temperature and structural stress, which in turn affects the amplitude of its movable structure, which leads ...

Claims

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Application Information

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IPC IPC(8): G01R29/12
CPCG01R29/12
Inventor 储昭志杨鹏飞闻小龙彭春荣夏善红刘宇涛吴双
Owner BEIJING TFLYING TRANSDUCER TECH CO LTD
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