Photoelectric detector with high bandwidth and high responsivity
A photodetector and responsivity technology, applied in the field of photodetectors, can solve the problems of complex manufacturing process of optical coupling lens, poor process repeatability, low product yield, etc., to achieve good responsivity, good convergence effect, easy focus and The effect of focal length
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[0038] refer to Figure 4 , as an embodiment of the present invention, a spacer layer 9 is also provided between the InP substrate 8 and the second grating layer 10, the shape of the spacer layer 9 matches the annular grating strip, the spacer layer 9 is made of InAlAs, and the thickness is At 180-600nm, the spacer layer 9 is finally oxidized, and the main component is Al with low refractive index. 2 o 3 .
[0039] refer to Figure 6 , in another embodiment of the second grating layer 10 of the present invention, its difference from the above-mentioned structure is that: the second grating layer 10 is provided with a round hole, and a plurality of grating bars are arranged in the round hole, and a plurality of The grating strips are arranged in parallel, the widths of each grating strip are not all the same or the gaps between adjacent grating strips are not all the same, a spacer layer 9 is provided between the second grating layer 10 and the substrate 8, and the spacer la...
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