Linear piezoelectric actuator containing force and displacement dual sensing and actuation method thereof

Abstract

The invention discloses a linear piezoelectric actuator with force and displacement sensing and an actuating method thereof.The actuator is composed of a force sensing part, a displacement sensing part and an actuating part from top to bottom, the mass centers of the force sensing part, the displacement sensing part and the actuating part are located on the same straight line, and the force sensing part is composed of a limiting layer, a force sensing flexible cap, a force Hall element, a permanent magnet and a magnet supporting frame; the displacement sensing part is composed of a displacement Hall element, a permanent magnet shared by the displacement sensing part and the force sensing part and a magnet supporting frame. The actuating part is composed of a cylindrical shell, an adjusting screw, an elastic clamping unit, an elliptical ring, a piezoelectric stack and an actuating block. The force sensing part is fixedly connected to the cylindrical shell in a threaded mode, and the displacement Hall element is bonded to the upper portion of the actuating part. The device is compact in structure, power-off locking is achieved, clamping force can be adjusted, the proportional linear Hall sensor is adopted for sensing output force and displacement, and linear displacement output can be generated under three load working conditions based on the inertial actuation principle and by means of asymmetric sawtooth wave driving voltage.

Description

technical field [0001] The invention belongs to the technical field of inertial piezoelectric actuators, and in particular relates to a linear piezoelectric actuator with double sensing of force and displacement and an actuating method thereof. Background technique [0002] Inertial piezoelectric actuator is a kind of mechanism that adopts asymmetrical driving signal, asymmetrical mechanical clamping structure or asymmetrical friction force as the control mode, and forms the driving mechanism through inertial impact motion. [0003] Compared with other types of piezoelectric drives, inertial piezoelectric actuators have the main advantages of simple structure, fast response, high resolution, large stroke, fast movement speed, and low cost. positioning accuracy. Therefore, inertial piezoelectric actuators are suitable for occasions that require high resolution and large strokes. At present, scientific and technological workers have successfully applied inertial piezoelectri...

AI Technical Summary

Problems solved by technology

[0004] Generally, linear inertial piezoelectric actuators contain linear guide rails inside the structure, and linear gratings are used to sense displacement. This design greatly increases the lateral size of the actuator, which limits the actuator's use in smaller application environments. In addition, the existing linear inertial actuators are generally used in the working conditions where one end is fixed and the other end drives the load, and it is difficult to perform well in the working conditions such as double-ended driving flexible loads.

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