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Lamb wave array device and atmospheric environment particle detection method thereof

A technology of atmospheric environment and detection method, which is applied in the field of sensors, can solve the problems of long detection time and high error rate, and achieve the effects of shortening detection time, improving accuracy and reducing volume

Active Publication Date: 2022-04-05
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the problems of long detection time and high error rate when detecting various particles in the prior art, and provide a Lamb wave array device and a method for detecting particles in an atmospheric environment

Method used

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  • Lamb wave array device and atmospheric environment particle detection method thereof
  • Lamb wave array device and atmospheric environment particle detection method thereof
  • Lamb wave array device and atmospheric environment particle detection method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] Example 1 Detection of Explosive Particles in Atmospheric Environment Based on Split Lamb Wave Array Device

[0044] 1.1 Preparation of membrane-type Lamb wave unit device with fixed support around it

[0045] In this embodiment, a sensor array is constructed by adopting a membrane-type Lamb wave unit device fixed around it. Specifically, the Lamb wave device is fabricated using an SOI wafer 210, such as figure 2 As shown in the partially enlarged diagram of FIG. 1 , it includes five layers of materials from bottom to top: bottom silicon 22 , buried silicon dioxide 25 , top silicon 21 , piezoelectric film 26 and metal electrodes. The material of the first three layers is the SOI wafer 210 , and the piezoelectric thin film 26 of the fourth layer is specifically an AlN piezoelectric thin film, which is directly deposited on the SOI wafer 210 without patterning. As for the fifth layer of metal electrodes, there are two materials of platinum and gold: the gold electrodes...

Embodiment 2

[0066] Embodiment 2 Monolithic integrated Lamb wave sensor array

[0067] In this example, as Figure 6 As shown, the Lamb wave unit device 2 in the monolithic integrated Lamb wave array 5 has a bridge suspension plate structure, and there are only two narrow bridge mechanical connections between the suspension plate and the SOI substrate, and the rest are disconnected to form air gaps. The suspended plate is composed of the top silicon of the SOI substrate and the AlN piezoelectric thin film deposited on it. In order to facilitate the excitation of Lamb waves, the structure of the suspension plate must be symmetrical to the center. In addition, considering the firmness of the mechanical structure, in this example, a narrow bridge is used in the center of the long side of the rectangular suspension plate to connect with the surrounding SOI frame. . Compared with the fixed-branched membrane-type Lamb wave unit device 2 in Example 1, the biggest difference between the two is t...

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Abstract

The invention discloses a Lamb wave array device and an atmospheric environment particle detection method thereof, and belongs to the technical field of sensors, the Lamb wave array device is composed of a plurality of Lamb wave unit devices with negative temperature coefficients, and each Lamb wave unit device is provided with an independent heater. The method comprises the following steps: respectively heating each Lamb wave unit device to a preheating temperature of a corresponding particle to be detected, wherein the preheating temperature is slightly lower than the melting point temperature of the particle to be detected; sampling the atmospheric environment to be measured; and finally, performing narrow temperature scanning on each Lamb wave unit device, and judging whether each unit device detects corresponding particles or not according to whether a reverse small peak exists in a temperature scanning spectrum or not. The sensor array can detect various particles at the same time, and the temperature scanning range of each unit device during working is limited within the range of not more than 10 DEG C above and below the melting point of a target particle, so that the detection time is greatly shortened, the detection process is accelerated, and the qualitative recognition accuracy of the particles can be improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a Lamb wave array device and a method for detecting particles in an atmospheric environment. Background technique [0002] In the existing new qualitative identification method of atmospheric particles based on the mass-temperature dual sensitivity effect of surface acoustic wave devices (SAW) (ZL201810481168.7), the surface acoustic wave devices used not only do not have sensitive membranes, but also generate sensing signals. It is not in the process of the substance to be measured (particles / gas) adsorbed on the surface of the device, but in the process of melting and evaporating the device after sampling to complete the collection of sensing signals, and then qualitatively identify the atmospheric particles. The method is only applicable to the detection of particles with a fixed melting point. Furthermore, the existing qualitative identification methods for atmospheric parti...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/02
Inventor 杜晓松方子龙王洋黄砚文龙吟许成成黎威志
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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