Photodiode, photodiode detector and manufacturing method thereof
A photodiode and photodetector technology, which is applied to circuits, electrical components, semiconductor devices, etc., can solve the problems of smaller absorption paths of incident light, lower long-wave absorption efficiency, and lower photoresponsivity of semiconductor devices, etc., so as to improve the photocurrent. Response, the effect of improving the absorption rate
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[0052] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the present invention. The terminology used in the present invention is for the purpose of describing particular embodiments only and is not intended to limit the invention.
[0053] Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0054] An embodiment of the present invention provides a photodiode, and the photodiode includes:
[0055]a substrate having opposing first and second surfaces, the material of which is a first conductivity type material;
[0056] A first doped region, loc...
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