Magnetic field sensor, manufacturing process and magnetic field detection method thereof

A magnetic field sensor and detection method technology, applied in the field of magnetic sensors, can solve problems such as poor three-dimensional magnetic field detection effect, and achieve the effect of overcoming the poor effect and improving accuracy and precision

Pending Publication Date: 2022-04-19
GOERTEK MICROELECTRONICS CO LTD
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Problems solved by technology

[0003] The main purpose of this application is to provide a magnetic field sensor, manufacturing process and magnetic field detection method thereof, a

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  • Magnetic field sensor, manufacturing process and magnetic field detection method thereof
  • Magnetic field sensor, manufacturing process and magnetic field detection method thereof

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[0037] In order to make the above-described objects, features and advantages of the present invention can be more obvious and understandable, the following will be combined with the accompanying drawings in the embodiments of the present invention, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the embodiments described are only a portion of the embodiments of the present invention, and not all embodiments. Based on embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without doing creative work, are within the scope of protection of the present invention.

[0038] High-precision magnetic field detection technology plays an important role in many application areas, such as navigation systems, automation equipment, biomedicine, etc., and the types of magnetic field sensors developed from this are becoming more and more abundant and more accurate, such as super...

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Abstract

The invention discloses a magnetic field sensor, a manufacturing process and a magnetic field detection method thereof, and the method comprises the following steps: manufacturing a sample magnetic field sensor, and enabling a magnetic induction device in the sample magnetic field sensor to be of a Hall rod structure; calibrating a standard change curve of the Hall resistance of the sample magnetic field sensor and the magnetic field intensity of each component; integrating a magnetic unit and the sample magnetic field sensor to obtain a standard magnetic field sensor; and detecting the actually-measured Hall resistance of the standard magnetic field sensor, inquiring the standard change curve according to the actually-measured Hall resistance, and determining the magnetic field intensity of each actually-measured component of the magnetic unit. The technical problem of poor high-precision three-dimensional magnetic field detection effect on the miniature magnetic unit in the prior art is solved, and the accuracy and precision of three-dimensional magnetic field detection on the miniature magnetic unit in the chip are greatly improved.

Description

Technical field [0001] The present application relates to the field of magnetic sensor technology, in particular to a magnetic field sensor, the production process and a magnetic field detection method thereof. Background [0002] High-precision magnetic field detection technology plays an important role in many application areas, such as navigation systems, automation equipment, biomedicine, etc., and the types of magnetic field sensors developed from this are becoming more and more abundant and more accurate, such as superconducting quantum interferometers, Hall sensors, magnetoresistive sensors (such as AMR (Anisotropic Magneto resistance, anisotropic magneto resistance) components, GMR (Giant Magneto resistance, Giant magnetoresistive) components and TMR (Tunnel MagnetoResistance, tunnel magnetoresistance) components, etc., greatly meet the needs of magnetic field detection in different working environments, even if the current magnetic field sensors are diverse, but are mor...

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Application Information

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IPC IPC(8): G01R33/07G01R33/02G01R33/00
CPCG01R33/07G01R33/0206G01R33/0052
Inventor 周良邹泉波冷群文丁凯文赵海轮张贺存李刚
Owner GOERTEK MICROELECTRONICS CO LTD
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