Device for detecting position of wafer in wafer boat box

Abstract

The invention relates to a wafer position detection device in a wafer boat box, which comprises a processing unit and a conveying belt, a cover closing position and a rear photographing position are sequentially arranged on the conveying belt, a cover closing mechanical arm is arranged above the conveying belt corresponding to the cover closing position, and a rear photographing mechanical arm is arranged above the conveying belt corresponding to the rear photographing position; the rear photographing mechanical arm comprises a fifth telescopic frame capable of stretching and retracting up and down and a rear photographing unit arranged on the fifth telescopic frame, and the rear photographing unit comprises five cameras for photographing the wafer box reaching the rear photographing position from the front, the rear, the left, the right and the upper part respectively; the box body covered with the box cover is photographed through the rear photographing unit, whether the box cover of the wafer box is well covered or not and whether the position of the wafer in the wafer box is correct or not are distinguished, and if the position is wrong, an alarm is given to remind a worker to intervene in processing, so that the problems of wafer breakage and the like in the subsequent transportation process caused by position dislocation of the wafer are prevented.

Description

technical field [0001] The invention belongs to the technical field of detecting the position of a wafer in a wafer boat box, and in particular relates to a wafer position detection device in a wafer boat box. Background technique [0002] In the back-end testing process of semiconductor large-scale integrated circuits, a large number of unpatterned wafers need to be inspected or defect re-inspected. In the process of transferring wafers between different process stations, multiple wafers of the same type are usually Place in a crystal boat box for transfer. The wafer box includes a box body and a matching box cover. After the wafer inspection is completed, the box body of the wafer box needs to be covered with the lid and then put into storage. At present, the action of closing the box cover after the wafer test is completed is manually completed by the personnel, that is, the personnel hold the cover of the wafer boat box and cover it on the box body. Due to the inaccurac...

AI Technical Summary

Problems solved by technology

At present, the action of closing the box cover after the wafer test is completed is manually completed by the personnel, that is, the personnel hold the cover of the wafer boat box and cover it on the box body. Due to the inaccuracy of the personnel operation, it is very easy to close the box cover. The position of the wafer in the wafer boat box is misaligned; if the wafer is misaligned, the wafer will move in the wafer boat box during the subsequent transportation process, resulting in the risk of wafer fragmentation and other risks

At present, after the box cover is manually covered, although visual inspection is also carried out, it is difficult for personnel to find the misplaced wafer in the first time because the wafer position needs to be checked through the wafer boat box, and visual inspection is difficult. And the efficiency of manual cover lid needs to be improved

Images