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Self-calibration method and device for spatial attitude of optical displacement measuring head

A space attitude and self-calibration technology, applied in the direction of optical devices, measuring devices, surveying and navigation, etc., can solve problems such as difficulty in adapting to high-efficiency and normalized calibration, high cost, and cumbersome operation

Pending Publication Date: 2022-04-22
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional attitude calibration methods such as laser trackers, standard balls, etc. for probe attitude calibration are not only costly, but usually require dedicated calibration equipment for each attitude error calibration, resulting in cumbersome operations and difficulty in adapting to high efficiency and normal conditions. Calibration needs

Method used

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  • Self-calibration method and device for spatial attitude of optical displacement measuring head
  • Self-calibration method and device for spatial attitude of optical displacement measuring head
  • Self-calibration method and device for spatial attitude of optical displacement measuring head

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Embodiment Construction

[0046] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0047] like figure 1 As shown, the gantry (2) is installed on the base (1), the center of the gantry (2) fixes the oscillating table (6), and rotates around the rotation center (7), and the electric adjustment frame (8) is installed on the oscillating table (6). ), the electric adjustment frame is driven by the electric pitch attitude adjustment actuator (5) and the electric yaw attitude adjustment actuator (9) to adjust the attitude of the optical displacement measuring head (4). A linear motion axis stator (15) and a linear motion axis mover (14) are installed at the center of the base (1). The workpiece adjustment platform (13) and the standard step gauge block (12) are installed successively on the top. The optical displacement measuring head (4) emits a measuring beam (3), which can obtain the position measurement of the high surface (10) of the standa...

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Abstract

The invention discloses an optical displacement measuring head space attitude self-calibration method and device. According to the self-calibration method and device, the standard step gauge block is scanned through the optical displacement measuring head to obtain the measurement data, and the self-calibration method and device calibrate the self-space attitude of the measuring head through the self-scanning data of the measuring head. The pitching attitude error and the deflection attitude error of the optical displacement measuring head can be calculated according to a scanning result and are automatically calibrated, so that full-automatic space attitude calibration of precise optical displacement measuring heads such as a spectrum confocal sensor and a laser interferometer displacement sensor is realized; the method is of great significance in improving the measurement precision and the use efficiency of instruments such as a three-dimensional topography instrument and a non-contact contourgraph integrated with the measuring head. The attitude error of the probe can be quickly and effectively eliminated, so that the measurement precision of the detection system is improved.

Description

technical field [0001] The invention relates to the technical field of precision measurement, in particular to a method and device for self-calibrating the spatial attitude of an optical displacement measuring head. Background technique [0002] Due to its non-contact, non-destructive, fast, and high-precision advantages, the optical displacement probe gradually replaces the traditional contact probe and becomes the core component of high-end geometric feature detection instruments such as three-dimensional profilometers, non-contact three-coordinates, and non-contact profilers. This type of instrument reconstructs the spatial point cloud of the actual surface of the measured object by combining the position data of the motion mechanism with the measurement data of the optical displacement probe, so as to realize the surface shape, contour, roundness, flatness, etc. of the measured workpiece. Accurate detection of a geometric feature measured in length. In order to ensure t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C21/00G01B11/02
CPCG01C21/00G01B11/02
Inventor 居冰峰张文浩李畅
Owner ZHEJIANG UNIV
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