Ni/Ti aperiodic multilayer film, preparation method and application thereof, and Ni/Ti aperiodic multilayer film neutron super-reflector

A non-periodic, multi-layer film technology, applied in the direction of material analysis, instruments, and measuring devices using wave/particle radiation, can solve problems such as roughness and diffusion, film microstructure and poor quality of interface effects

Pending Publication Date: 2022-05-03
苏州闻道电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] At the same time, the optical properties of the multilayer film also depend on the microstructure and interface effects of the film layer, but the Ni / Ti aperiodic multilayer film prepared so far will generate a larger grain size during the growth process, and the Ni to Ti Significant diffusion tends to form a rough and diffuse interface, resulting in poor quality of film microstructure and interface effects

Method used

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  • Ni/Ti aperiodic multilayer film, preparation method and application thereof, and Ni/Ti aperiodic multilayer film neutron super-reflector
  • Ni/Ti aperiodic multilayer film, preparation method and application thereof, and Ni/Ti aperiodic multilayer film neutron super-reflector
  • Ni/Ti aperiodic multilayer film, preparation method and application thereof, and Ni/Ti aperiodic multilayer film neutron super-reflector

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preparation example Construction

[0026] The invention provides a method for preparing a Ni / Ti aperiodic multilayer film, comprising the following steps:

[0027] in N 2 , O 2 In a mixed atmosphere of Ar and Ar, a Ni layer is sputtered on the surface of the substrate to obtain NiN x o y layer; the value range of x is 0≤x<1, and the value range of y is 0≤y<1;

[0028] In an Ar atmosphere, the NiN x o y The Ti layer is sputtered on the surface of the layer to obtain the Ti layer;

[0029] Repeat the process of sputtering Ni layer and sputtering Ti layer to obtain the Ni / Ti aperiodic multilayer film;

[0030] The number of repetitions is ≥1.

[0031] In the present invention, unless otherwise specified, all preparation materials are commercially available products well known to those skilled in the art.

[0032] The invention is in N 2 , O 2 In a mixed atmosphere of Ar and Ar, a Ni layer is sputtered on the surface of the substrate to obtain NiN x o y layer; the value range of x is 0≤x<1, and the valu...

Embodiment 1

[0058] Ni / Ti aperiodic multilayer neutron superreflector:

[0059] Substrate: float glass with a thickness of 5mm;

[0060] Base layer: Ti layer with a thickness of 10nm;

[0061] Ni / Ti non-periodic multilayer film: NiN with alternate stacking arrangement x o y layer and Ti layer, the number of alternation is 90, NiN x o y The thickness of the Ti layer is 7-19nm (increase layer by layer from the inside to the outside, the thickness of the innermost layer is 7nm, and the thickness of the outermost layer is 19nm), the thickness of the Ti layer is 7-27nm (increase layer by layer from the inside to the outside, The thickness of the innermost layer is 7nm, the thickness of the outermost layer is 27nm), 0≤x<1, 0≤y<1;

[0062] Ni cap layer: Ni layer with a thickness of 50nm;

[0063] making process:

[0064] After the float glass with a thickness of 5 mm is pretreated to remove impurities on the surface, a Ti layer with a thickness of 10 nm is sputtered to obtain a bottom laye...

Embodiment 2

[0068] Ni / Ti aperiodic multilayer neutron superreflector:

[0069] Substrate bottom: float glass with a thickness of 5nm;

[0070] Base layer: Ti layer with a thickness of 10nm;

[0071] Ni / Ti non-periodic multilayer film: NiN with alternate stacking arrangement x o y layer and Ti layer, the number of alternation is 199, NiN x o y The thickness of the layer is 5-14nm (increase layer by layer from inside to outside, the thickness of the innermost layer is 5nm, the thickness of the outermost layer is 14nm), the thickness of Ti layer is 4-12nm (increase layer by layer from inside to outside, The thickness of the innermost layer is 4nm, the thickness of the outermost layer is 12nm), 0≤x<1, 0≤y<1;

[0072] Ni cap layer: a Ni layer with a thickness of 60nm;

[0073] making process:

[0074] After the float glass with a thickness of 5 mm is pretreated to remove impurities on the surface, a Ti layer with a thickness of 10 nm is sputtered to obtain a bottom layer;

[0075] On t...

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Abstract

The invention relates to the technical field of neutron super-reflectors, in particular to a Ni / Ti aperiodic multilayer film, a preparation method and application of the Ni / Ti aperiodic multilayer film and a Ni / Ti aperiodic multilayer film neutron super-reflector. The invention provides a preparation method of a Ni / Ti aperiodic multilayer film, which comprises the following steps of: sputtering a Ni layer on the surface of a substrate in a mixed atmosphere of N2, O2 and Ar to obtain a NiNxOy layer; the value range of x is 0 < = xlt; the value range of y is not less than 0 and y < lt >; 1; in an Ar atmosphere, sputtering a Ti layer on the surface of the NiNxOy layer to obtain a Ti layer; and repeating the process of sputtering the Ni layer and the process of sputtering the Ti layer to obtain the Ni / Ti aperiodic multilayer film. The number of times of repetition is greater than or equal to 1. According to the preparation method of the Ni / Ti aperiodic multilayer film, the interface roughness can be reduced, and the film forming quality can be improved.

Description

technical field [0001] The invention relates to the technical field of neutron superreflectors, in particular to a Ni / Ti aperiodic multilayer film, a preparation method and application thereof, and a Ni / Ti aperiodic multilayer neutron superreflector. Background technique [0002] With the rapid development and wide application of neutron detection technology, the requirements for the intensity of neutrons incident on the surface of the sample are getting higher and higher. Neutron multilayer optical components are one of the effective means to improve the reflectivity and utilization of neutrons . A neutron superreflector is a non-periodic multilayer film composed of two materials with a large difference in neutron optical constants. This aperiodic multilayer film has different periodic thicknesses at different positions of the film system, which can make incident neutrons with different wavenumbers reflected at different positions of the multilayer film mirror, thereby exp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/20008
CPCG01N23/20008
Inventor 朱京涛孙航林旺陈溢祺屠洛涔郭汉明
Owner 苏州闻道电子科技有限公司
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