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Semiconductor device

A semiconductor and metal wiring technology, applied in the direction of semiconductor devices, semiconductor/solid-state device components, electric solid-state devices, etc., can solve problems such as low device integration

Pending Publication Date: 2022-05-06
INST OF MICROELECTRONICS CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For this reason, the application proposes a semiconductor device to solve the problem of low device integration

Method used

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  • Semiconductor device
  • Semiconductor device

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Embodiment Construction

[0013] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts of the present disclosure.

[0014] Various structural schematic diagrams according to embodiments of the present disclosure are shown in the accompanying drawings. The figures are not drawn to scale, with certain details exaggerated and possibly omitted for clarity of presentation. The shapes of the various regions and layers shown in the figure, as well as their relative sizes and positional relationships are only exemplary, and may deviate due to manufacturing tolerances or technical limitations in practice, and those skilled in the art will Regions / layers with different shapes, ...

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PUM

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Abstract

The invention relates to the technical field of semiconductors, in particular to a semiconductor device, which comprises a semiconductor substrate on which a chip area and a cutting line area are formed; the first sealing ring is arranged between the chip area and the cutting line area, and the first sealing ring is arranged around the chip area; wherein a vertical natural capacitor is formed in the first sealing ring, and the vertical natural capacitor is integrated in the sealing ring, so that the integration level of the chip is higher, the space is saved, and the miniaturization of the chip is achieved.

Description

technical field [0001] The present application relates to the technical field of semiconductors, and in particular to a semiconductor device. Background technique [0002] In an integrated circuit of a semiconductor chip, a seal-ring has a great influence on the reliability of the chip. A conventional semiconductor chip includes an integrated circuit region and a seal-ring arranged on the periphery of the semiconductor chip. Wherein, the integrated circuit region may include various electronic devices, such as passive devices and active devices formed on a substrate. The sealing ring is interposed between the scribe lane (Scrbe Lane, SL) of the wafer and the integrated circuit region (circuit Region). When the wafer dicing process is performed along the dicing street, the sealing ring can block unwanted stress extension and cracking from the dicing street to the chip caused by the above-mentioned wafer dicing process. Moreover, the chip semiconductor device also has the ab...

Claims

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Application Information

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IPC IPC(8): H01L23/31H01L23/528H01L23/64
CPCH01L23/3171H01L23/642H01L23/528H01L23/5283
Inventor 柳圣浩张欣杨涛赵劼
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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