A Highly Integrated Self-Powered Pressure Sensor

Abstract

The invention provides a self-powered pressure sensor possessing a high integration degree. The pressure sensor comprises a packaging shell. A cylinder of a vertical through hole is arranged in the packaging shell. The cylinder is mainly formed by a pressure sensing unit and a piezoelectric energy harvester unit which are stacked up and down. A non-polarized isolation layer is arranged between the pressure sensing unit and the piezoelectric energy harvester unit. An energy management module and a signal processing module are arranged in the vertical through hole. An output electrode of the piezoelectric energy harvester unit is electrically connected to an input terminal of the energy management module. An output electrode of the pressure sensing unit is electrically connected to an input terminal of the signal processing module. An output terminal of the energy management module is electrically connected to a power supply terminal of the signal processing module. The self-powered pressure sensor possessing the high integration degree can directly output a digital signal, can work autonomously, does not bring any burden for an external circuit and is suitable for the pressure sensing field.

Description

technical field [0001] The invention relates to the technical field of pressure sensors, in particular to a self-powered pressure sensor with high integration. Background technique [0002] Pressure sensor is the most commonly used sensor in industrial practice. It is widely used in various industrial automatic control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production automatic control, aerospace, military industry, petrochemical, oil wells, electric power, ships, machine tools , pipeline and many other industries. At the same time, sensor nodes of the Internet of Things are widely used. By improving the structure and function of sensors, making sensors more suitable for sensor nodes of the Internet of Things is a hot topic in the field of sensor research. [0003] At present, conventional pressure sensors or other sensors more or less need corresponding external power supply or internal battery power supply,...

AI Technical Summary

Problems solved by technology

Therefore, the application of IoT sensor node technology is limited by the problem of sensors relying on external complex processing circuits and the problem of power supply for circuit work.

Images