High-temperature-resistant ceramic coating graphite tray assembly

A technology for high-temperature resistant ceramics and graphite trays, applied in coatings, metal material coating processes, gaseous chemical plating, etc., can solve the problems of scrapping graphite tray components, corrosion holes, and damage to tray surface coatings, etc.

Active Publication Date: 2022-05-10
广州志橙半导体有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005]The present invention provides a high-temperature resistant ceramic coated graphite tray assembly to solve the above-mentioned background technology: air suspension leads to unstable attitude and height, resulting in tray It is easy to touch the carrying plate during the movement, thereby damaging the surface coating of the tray; once the coating has local, even small cracks that are invisible to the naked eye, it will be invaded, penetrated and reacted by corrosive gases, thereby corroding the graphite. Will eventually produce corrosion voids, resulting in the scrapping of graphite tray components and reducing the technical problem of service life

Method used

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  • High-temperature-resistant ceramic coating graphite tray assembly
  • High-temperature-resistant ceramic coating graphite tray assembly
  • High-temperature-resistant ceramic coating graphite tray assembly

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] The embodiment of the present invention provides a high-temperature resistant ceramic coated graphite tray assembly, including: a carrying plate 1, a number of supporting and fixing devices, a number of trays 5, and a mechanical drive mechanism;

[0047] A plurality of trays 5 are connected to the carrying tray 1 through several supporting and fixing devices (several supporting and fixing devices, and several trays 5 are arranged in one-to-one correspondence), and the mechanical drive mechanism is used to drive the carrying tray 1 and the trays 5 turn.

[0048] Preferably, specifically, the support and fixing device includes:

[0049] The first circular groove is arranged on the carrying large plate 1, the first ball track 2 is laid on the first circular groove, the first ball track 2 is filled with balls 3, and the tray 5 is provided with a second circular groove or a second ball track 4 that cooperates with the ball 3; wherein, the size and shape of the second ball t...

Embodiment 2

[0058] The embodiment of the present invention provides a high-temperature resistant ceramic coated graphite tray assembly, including: a carrying plate 1, a number of supporting and fixing devices, a number of trays 5, and a mechanical drive mechanism;

[0059] Several trays 5 are connected to the carrying tray 1 through several supporting and fixing devices, and the mechanical drive mechanism is used to drive the carrying tray 1 and the trays 5 to rotate.

[0060] Preferably, specifically, the supporting and fixing device includes: an intermediate positioning column 6 , the upper end of which is fixed at the center of the bottom of the tray 5 , and the lower end of the intermediate positioning column 6 is rotatably connected to the carrying large plate 1 .

[0061] Preferably, the middle positioning column 6 is connected to the bottom of the tray 5 through a high-temperature-resistant and wear-resistant connector (a connector made of a high-temperature-resistant and wear-resis...

example 1

[0063] In Example 1, the ball 3 is used to support the tray 5, and the middle positioning post 6 plays a role of fixing; while in this embodiment, the middle positioning post 6 plays the role of supporting and fixing, and the ball 3 is removed.

[0064] The beneficial effect of the above-mentioned technical solution is: in this embodiment, the method of suspending the tray is replaced by the mechanical method driven by gears and the middle positioning column is opened, so as to overcome the problems caused by the unstable and uneven air flow during rotation. Friction and collision of the load-carrying plate will cause cracks, and it can also avoid the direct contact between the coating and the moving parts to expose the graphite substrate, which will be infiltrated by corrosive gases, causing the graphite to collapse and cause the tray components to be scrapped, thereby effectively improving the high temperature resistant ceramic coating. Layer graphite tray assembly life.

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Abstract

The invention provides a high-temperature-resistant ceramic coating graphite tray assembly. The high-temperature-resistant ceramic coating graphite tray assembly comprises a large bearing disc, a plurality of supporting and fixing devices, a plurality of trays and a mechanical driving mechanism. The bearing large disc is connected with a plurality of trays through a plurality of supporting and fixing devices, and the mechanical driving mechanism is used for driving the bearing large disc and the trays to rotate. In the MOCVD or high-temperature CVD epitaxial growth furnace, the bearing large disc and the tray are supported by the balls and the middle positioning columns, and a mechanical method of gear driving is used for replacing an existing method of suspending the tray by airflow guiding, so that the friction and collision between the tray and the bearing large disc caused by unstable and non-uniform airflow during rotation are overcome; and the defect that the tray assembly is scrapped due to graphite disintegration caused by the penetration of corrosive gas due to the exposure of the graphite substrate caused by the direct contact abrasion of the coating and a moving part can be avoided, so that the service life of the high-temperature-resistant ceramic coating graphite tray assembly is effectively prolonged.

Description

technical field [0001] The invention relates to the technical field of tray components, in particular to a high-temperature-resistant ceramic-coated graphite tray component. Background technique [0002] With the rise of the third generation of semiconductor materials, semiconductor lighting industry technology is considered to be the next generation of new solid-state light sources entering the field of general lighting, and its market development prospects are optimistic, and LED epitaxial wafers are the cornerstone of semiconductor lighting industry technology. Epitaxial wafers are located in the upstream link of the LED industry chain, which is the link with the highest technical content in the semiconductor lighting industry and the greatest impact on the final product quality and cost control. [0003] At present, the growth technology of LED epitaxial wafer mainly adopts the method of organic metal chemical vapor deposition. The LED epitaxial wafer reaction chamber is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/458
CPCC23C16/4582
Inventor 邹明蓓朱佰喜薛抗美蒋彪蒋旭霞
Owner 广州志橙半导体有限公司
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