Dynamic balance debugging pump shell and debugging device and method with same

Abstract

The invention relates to the technical field of vacuum obtaining equipment, in particular to a dynamic balance debugging pump shell and a debugging device and method with the same. A dynamic balance debugging pump shell is provided with a side wall, one end of the side wall is provided with an opening end used for being connected with a pump body of a molecular pump to be tested in a sealed mode, and the other end of the side wall is provided with an end cover. A debugging hole which can be opened is formed in a position, opposite to a balance nail hole in a turbine of the molecular pump to be tested, on the side wall; a detachable gland is arranged on the debugging hole, and a first sealing ring is arranged between the gland and the periphery of the debugging hole. According to the dynamic balance debugging pump shell provided by the invention, in the whole dynamic balance test of the molecular pump, a tester does not need to repeatedly disassemble and assemble the pump shell of the molecular pump, and the dynamic balance debugging of the molecular pump can be carried out only by adding or reducing the balance nails at the balance nail holes at the corresponding positions through the debugging holes; the disassembly and assembly time of the pump shell of the molecular pump in the test is effectively shortened, so that the test efficiency is improved, and the labor intensity of testers can be relieved.

Description

technical field [0001] The invention relates to the technical field of vacuum obtaining equipment, in particular to a dynamic balance debugging pump casing and a debugging device and method having the same. Background technique [0002] The magnetic levitation molecular pump is used as a vacuum obtaining device, and its working principle is to facilitate the high-speed rotating turbine rotor to transfer momentum to the gas molecules, and the gas molecules are directionally discharged from the vacuum chamber at a certain speed. [0003] The dynamic balance debugging of the magnetic levitation molecular pump is an important link to ensure the qualification of the molecular pump, and it is also a key process to ensure the safety of the molecular pump. In the magnetic levitation molecular pump, the rotor speed is as high as 20000-30000r / min, which needs to be operated with a high-precision dynamic balancer or displacement monitoring software. [0004] In the dynamic balance tes...

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Problems solved by technology

[0006] Therefore, the technical problem to be solved by the present invention is to overcome the problem that the tester needs to repeatedly disassemble the pump of the molecular pump in order to install a balance nail on the balance nail hole of the turbine during the whole motor balance test of the magnetic levitation molecular pump in the prior art. shell, resulting in long test time and low overall test efficiency, so as to provide a dynamic balance debugging pump casing and its debugging device and method

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