Electron beam detection device and detection method
A detection device and electron beam technology, applied in measuring devices, radiation measurement, X/γ/cosmic radiation measurement, etc., can solve the problems of low accuracy and complex structure, and achieve high detection accuracy, structure and detection method simple effect
Pending Publication Date: 2022-06-21
TSINGHUA UNIV +1
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Problems solved by technology
[0003] However, the existing electron beam detection devices and detection methods have low accuracy and complex structure
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[0034] The electron beam detection device and detection method provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0035] see figure 1 and figure 2 , the first embodiment of the present invention provides an electron beam detection device 10 . The electron beam detection device 10 includes a porous carbon material layer 102 , a substrate 103 , an image display 104 and a Faraday cup 105 . The image display 104 is electrically connected to the porous carbon material layer 102 .
[0036] The porous carbon material layer 102 has a first through hole 1021, and the cross-sectional area of the first through-hole 1021 is less than or equal to the cross-sectional area of the electron beam to be measured. The first through holes 1021 run through the thickness direction of the porous carbon material layer 102. The substrate 103 has a second through hole 1031 . The Faraday cup 105 has an opening 1051 . The porous ca...
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Abstract
The invention provides an electron beam detection device, which comprises a porous carbon material layer, the porous carbon material layer is provided with a through hole, the porous carbon material layer is composed of a plurality of carbon material particles, nanoscale or micron gaps exist among the plurality of carbon material particles, and the cross sectional area of the through hole is smaller than or equal to the cross sectional area of an electron beam to be detected; the Faraday cup is arranged below the porous carbon material layer, the Faraday cup is provided with an opening, and the opening is communicated with the through hole of the carbon nanotube porous layer; and the image display is electrically connected with the porous carbon material layer, the image display forms images with different colors according to the quantity of charges generated in the porous carbon material layer, and an image of the electron beam to be detected is obtained according to the colors of the images in the image display. The invention also provides an electron beam detection method.
Description
technical field [0001] The invention relates to an electron beam detection device and a detection method, in particular to an electron beam detection device and a detection method using a porous carbon material layer. Background technique [0002] The electrons are accelerated by force in the electric field, their energy is increased, and they are combined into a beam in a vacuum to generate an electron beam. Electron beam technology has been widely used in the fields of forming, manufacturing and refining of superalloys, welding of superalloys, surface modification and coating preparation, and will continue to be involved in various fields such as aerospace, defense and military industry and nuclear industry. In the prior art, it is often necessary to detect the shape and radius of the cross section of the electron beam to draw an image of the electron beam. [0003] However, the existing electron beam detection devices and detection methods have low accuracy and complex s...
Claims
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IPC IPC(8): G01T1/29
CPCG01T1/29G01T1/2914G01T7/00
Inventor 张科陈果柳鹏姜开利范守善
Owner TSINGHUA UNIV