Semiconductor structure with trench junction barrier schottky diode
A junction barrier Schottky and semiconductor technology, applied in the direction of diodes, semiconductor devices, transistors, etc., can solve the problems of low resistance, long current path, and inability to have
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[0029] Please refer to figure 1 , figure 1 A schematic top view of a semiconductor structure 100 with a trench junction barrier Schottky diode according to an embodiment of the present invention is shown; wherein the distance C1 represents the trench width of the UMOS structures 30 , 40 and 50 ; the distance C2 represents the trench junction The trench width of the barrier Schottky diode 10 .
[0030] Please note that each cell of the semiconductor structure 100 is a structure in which a UMOS structure and a trench junction barrier Schottky diode are connected in parallel.
[0031] Please refer to figure 2 , figure 2 show the invention figure 1 A schematic diagram of an embodiment of the A-B cross-section of the semiconductor structure 100 includes a trench junction barrier Schottky diode 10, and the trench junction barrier Schottky diode 10 includes: a metal layer 10a, an N-type semiconductor substrate 10b, and an N-type drift region. (N-drift region) 10c, N-type curre...
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