Piezoelectric driving six-degree-of-freedom compliant positioning system and control method thereof

Abstract

The invention discloses a piezoelectric driving six-degree-of-freedom compliant positioning system which comprises an industrial personal computer, the industrial personal computer is electrically connected with a piezoelectric ceramic controller, the piezoelectric ceramic controller is electrically connected with a plurality of piezoelectric ceramic actuators, and the piezoelectric ceramic actuators are arranged at the bottom of a six-degree-of-freedom compliant positioning platform. Driving branch chains are arranged on the four sides of the six-degree-of-freedom flexible positioning platform, the displacement detection stop block is fixed to the centroid position of the upper surface of the flexible positioning platform, the multiple capacitance displacement sensors are arranged on the surface of the displacement detection stop block at equal intervals, and gaps are reserved in parallel. According to the scheme, the compliant positioning platform adopts modular and symmetrical design, the mechanism is simple and compact, feedback is simple and easy to use by adopting the capacitance sensor and the tilt angle sensor, closed-loop control positioning is accurate, and the platform is suitable for different application occasions.

Description

technical field [0001] The invention relates to the technical field of workpiece compliance positioning detection, in particular to a piezoelectric driving six-degree-of-freedom compliance positioning system and a control method thereof. Background technique [0002] With the rapid development of precision engineering technology and cutting-edge scientific research, the demand for nano-level precision positioning technology is also increasing day by day. For example, in the fields of light source synchrotron, aerospace and other fields, the beamline spot and sample size of high-precision experiments are in nanometer and micrometer scales. Therefore, the position adjustment of precision instruments or optical devices often requires the positioning platform to meet the requirements of nanometer precision. Piezoelectric ceramics have the advantages of small size, high displacement resolution, large output force, and fast response speed, and are very suitable as driving devices....

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Problems solved by technology

[0005] The purpose of the present invention is to provide a piezoelectric-driven six-degree-of-freedom compliant positioning system and its control method to solve the problem that the existing six-degree-of-freedom compliant positioning system proposed by the above-mentioned background technology cannot meet the six-degree-of-freedom position adjustment of precision instruments or optical devices demand problem

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