Cascade backstop device and MEMS sensor

A stop device and cascading technology, which is applied in the direction of measuring devices, microstructure devices, instruments, etc., can solve problems that affect the normal operation of inertial sensors, structural fractures, and affect device performance, and achieve poor stop effect and short buffer time , the effect of improving reliability

Pending Publication Date: 2022-06-24
MEMSENSING MICROSYST SUZHOU CHINA
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Problems solved by technology

However, when the MEMS sensor is subjected to excessive impact, it will cause a large displacement and cause structural fracture, which will affect the performance of the device. The existing solution is to use a stopper to limit the displacement of the inertial sensor
However, in most solutions, the stopper part is in hard contact with the movable structure, which is prone to debris and further affects the normal operation of the inertial sensor

Method used

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  • Cascade backstop device and MEMS sensor
  • Cascade backstop device and MEMS sensor
  • Cascade backstop device and MEMS sensor

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Embodiment Construction

[0024] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present invention. Obviously, the described embodiments are a part of the present invention. examples, but not all examples. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, technical or scientific terms used herein should have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, "comprising" and similar words mean that the elements or things appearing before the word encompass the elements or things recited after the word and their equivalents, but do not excl...

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Abstract

The invention provides a cascade backstop device and an MEMS sensor, the cascade backstop device comprises an anchor point, at least two first backstop units and at least one second backstop unit, the anchor point is in contact with the first backstop units, the first backstop units and the second backstop units are sequentially connected at intervals, and the first backstop units are in contact with the second backstop units. The number of the first stop units is one more than that of the second stop units; on the plane perpendicular to the cascade direction of the cascade backstop device, the projection contour of the first backstop unit is located on the inner side of the projection contour of the anchor point, and the projection contour of the first backstop unit is located on the inner side of the projection contour of the second backstop unit. When the MEMS sensor is collided, a buffering protection effect can be achieved, adhesion is avoided, and the reliability of the sensor is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor devices, in particular to a cascade stopper device and a MEMS sensor. Background technique [0002] MEMS sensors have the advantages of small size, low cost, and mass production, so they are widely used in consumer electronics, automotive electronics, aerospace and other fields. However, when the MEMS sensor is subjected to excessive impact during operation, it will generate a large displacement, which will lead to structural fracture and affect the performance of the device. The existing solution is to use a stopper to limit the displacement of the inertial sensor. However, in most of the solutions, the stop part is in hard contact with the movable structure, and debris is easily generated, which further affects the normal operation of the inertial sensor. [0003] Therefore, it is necessary to provide a new type of cascade stopper device and MEMS sensor to solve the above problems existin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C21/16B81B7/02
CPCG01C21/166B81B7/02
Inventor 张沛庄瑞芬李诺伦
Owner MEMSENSING MICROSYST SUZHOU CHINA
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