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Positioning tool and mounting method of excimer laser preionization tube

A technology for excimer lasers and positioning tooling, which is applied to lasers, phonon exciters, laser components, etc., can solve problems such as damage to pre-ionization tubes, achieve the effects of easy operation, ensure assembly quality, and avoid damage

Pending Publication Date: 2022-07-01
RAINBOW SOURCE LASER RSLASER
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method not only consumes a lot of time and energy, but also easily causes damage to the pre-ionization tube

Method used

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  • Positioning tool and mounting method of excimer laser preionization tube
  • Positioning tool and mounting method of excimer laser preionization tube
  • Positioning tool and mounting method of excimer laser preionization tube

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Embodiment Construction

[0031] The following description serves to disclose the invention to enable those skilled in the art to practice the invention. The preferred embodiments described below are given by way of example only, and other obvious modifications will occur to those skilled in the art. The basic principles of the invention defined in the following description may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.

[0032] It should be understood by those skilled in the art that in the disclosure of the present invention, the terms "vertical", "horizontal", "upper", "lower", "front", "rear", "left", "right", The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the...

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Abstract

The invention relates to a positioning tool and a mounting method of an excimer laser preionization tube, the positioning tool is provided with a base and a step piece extending upwards from the base, the base is provided with a base side face, the step piece is provided with a protruding part protruding out of the top of the base, and the step piece is provided with a positioning hole. The step piece is provided with a first side face and a second side face opposite to the first side face, the second side face extends to form at least two positioning pieces, and each positioning piece is composed of a cylinder and a rectangular positioning strip integrally extending to be formed on the cylinder. The positioning tool is suitable for being arranged on the step end face of an anode base of the excimer laser, and the distance between the tail end face of the pre-ionization tube and the step end face can be accurately kept. And axial movement and radial movement of the pre-ionization tube can be limited, so that the pre-ionization tube can be quickly and accurately positioned, and the assembly quality of the pre-ionization tube is ensured.

Description

technical field [0001] The invention relates to the technical field of excimer lasers, in particular to a positioning tool and an installation method for a pre-ionization tube of an excimer laser. Background technique [0002] During the assembly process of the excimer laser, the positioning of the pre-ionization tube in the anode assembly is involved. The traditional pre-ionization tube positioning method is to pre-position the pre-ionization tube manually and indirectly by means of the plane of a certain material, and then pass The top wire is passed through the through hole on the anode base to push the pre-ionization tube tightly, so as to lock and position the pre-ionization tube. Since the outer surface of the pre-ionization tube is a smooth cylindrical surface, during the positioning process, the pre-ionization tube is likely to rotate, so that the two ends of the pre-ionization tube are not facing upwards. Inaccurate positioning of the pre-ionization tube will affec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/038
CPCH01S3/0381
Inventor 张寅虎陈文斌刘斌刘广义徐向宇江锐
Owner RAINBOW SOURCE LASER RSLASER
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