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Reverse conducting insulated gate bipolar transistor with anode integrated with Schottky super barrier auxiliary gate

A technology of bipolar transistors and auxiliary gates, applied in semiconductor devices, electrical components, circuits, etc., can solve problems such as inability to achieve reverse conduction performance, complex external drive circuits, and weak forward conduction capabilities of devices, so as to achieve reverse Conduction capability, elimination of negative resistance effect, and improvement of working stability

Pending Publication Date: 2022-07-05
CHONGQING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the existing structure, either the forward conduction capability of the device is weak, or a complex external drive circuit is required, or the reverse conduction performance cannot be achieved. In addition, the trade-off relationship between the on-state loss and the off-state loss needs to be further optimized.

Method used

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  • Reverse conducting insulated gate bipolar transistor with anode integrated with Schottky super barrier auxiliary gate
  • Reverse conducting insulated gate bipolar transistor with anode integrated with Schottky super barrier auxiliary gate
  • Reverse conducting insulated gate bipolar transistor with anode integrated with Schottky super barrier auxiliary gate

Examples

Experimental program
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Effect test

Embodiment 1

[0065] A reverse-conducting insulated gate bipolar transistor with an anode integrated Schottky super-barrier auxiliary gate, comprising an anode contact region 1, a heavily doped second conductive type anode region 2, a first conductive type anode buffer 3, a A conductivity type drift region 4, a second conductivity type cathode well region 5, a heavily doped first conductivity type cathode region 6, a heavily doped second conductivity type cathode region 7, a cathode contact region 8, a gate dielectric layer 9, a gate A pole contact region 10 , an anode auxiliary gate dielectric layer 13 , an anode auxiliary gate contact region 14 and an anode Schottky contact region 15 .

[0066] The first conductive type drift region 4 covers the first conductive type anode buffer region 3 .

[0067] The second conductivity type cathode well region 5 covers the first conductivity type drift region 4 .

[0068] The heavily doped first conductivity type cathode region 6 and the heavily dope...

Embodiment 2

[0086] A reverse-conducting insulated gate bipolar transistor with an anode integrated Schottky super-barrier auxiliary gate, comprising an anode contact region 1, a heavily doped second conductive type anode region 2, a first conductive type anode buffer 3, a A conductivity type drift region 4, a second conductivity type cathode well region 5, a heavily doped first conductivity type cathode region 6, a heavily doped second conductivity type cathode region 7, a cathode contact region 8, a gate dielectric layer 9, a gate A pole contact region 10 , an anode auxiliary gate dielectric layer 13 and an anode Schottky contact region 15 .

[0087] The first conductive type drift region 4 covers the first conductive type anode buffer region 3 .

[0088] The second conductivity type cathode well region 5 covers the first conductivity type drift region 4 .

[0089] The heavily doped first conductivity type cathode region 6 and the heavily doped second conductivity type cathode region 7 ...

Embodiment 3

[0107] The first conductivity type is selected to be N-type, and the second conductivity type is selected to be P-type.

[0108] like Figure 5 As shown, a reverse-conducting insulated gate bipolar transistor with an anode integrated Schottky super-barrier auxiliary gate includes an anode contact region 1, an anode P+ region 2, an N-type buffer region 3, an N-type drift region 4, and a P+ region. Type cathode well region 5, cathode N+ region 6, cathode P+ region 7, cathode contact region 8, gate dielectric layer 9, gate contact region 10, anode auxiliary gate dielectric layer 13, anode auxiliary gate contact region 14 and anode Schott base contact area 15;

[0109] The N-type drift region 4 covers the N-type buffer zone 3;

[0110] The P-type cathode well region 5 covers part of the surface above the N-type drift region 4; the cathode N+ region 6 and the cathode P+ region 7 cover part of the surface above the P-type cathode well region 5; the cathode contacts The region 8 c...

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Abstract

The invention discloses a reverse conducting insulated gate bipolar transistor with an anode integrated with a Schottky super barrier auxiliary gate. Comprising an anode contact region (1), a heavily doped second conductive type anode region (2), a first conductive type anode buffer region (3), a first conductive type drift region (4), a second conductive type cathode well region (5), a heavily doped first conductive type cathode region (6), a heavily doped second conductive type cathode region (7), a cathode contact region (8), a gate dielectric layer (9), a gate contact region (10) and an anode auxiliary gate dielectric layer (13), an anode auxiliary gate contact region (14) and an anode Schottky contact region (15); according to the invention, the negative resistance effect when the device is turned on can be eliminated, the working stability of the device is improved, and a better trade-off relationship between the on-state loss and the off-state loss is obtained; and the reverse conduction capability of the device is realized.

Description

technical field [0001] The invention relates to the field of conductance modulated high-voltage power devices in the technical field of semiconductor power electronic devices, in particular to a reverse conduction insulated gate bipolar transistor with an anode integrated Schottky super-barrier auxiliary gate. Background technique [0002] Insulated gate bipolar transistor (IGBT: LateralInsulatedGateBipolarTransistor) has the advantages of simple driving, large current capability and high withstand voltage capability, but its turn-off speed is much higher than that of double-diffused metal-oxide-semiconductor effect transistor (DMOS, Double-diffusedMOSFET) The slow turn-off speed of the transistors leads to large switching losses, which affects the application of edge-gate bipolar transistors in power electronic systems. [0003] There are three main methods to improve the turn-off speed of IGBT devices to reduce switching losses: [0004] One is to reduce the lifetime of n...

Claims

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Application Information

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IPC IPC(8): H01L29/06H01L29/47H01L29/423H01L29/739
CPCH01L29/0684H01L29/47H01L29/42312H01L29/7393
Inventor 陈文锁简鹏王玉莹张澳航李剑廖瑞金
Owner CHONGQING UNIV