Magnetic resistance effect device, magnetic head, magnetic recording equipment and storage device
A storage device, magnetoresistance technology, applied in the direction of recording information storage, magnetic recording, magnetic recording head, etc., can solve the problems of inability to eliminate, deterioration of the characteristics of the magnetoresistance effect device, etc.
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Embodiment 1
[0098] Using Si as a substrate and Cr, Pt, CoPt, Ir, CoFe, Al, Cu, and NiFe as targets, the magnetoresistance effect device 100 shown in FIG. 1 was manufactured by sputtering. In step 1, a Cu / Pt / Cr film with a thickness of 50 nm was formed on a Si substrate as a lower electrode. Then, a magnetoresistance effect device having the following structure was fabricated on the Cu / Pt / Cr film.
example
[0099] Example sample 1: CoPt(25) / CoFe(3) / IrO(0.8) / CoFe(3) / Al 2 o 3 (1.4) / CoFe(1) / NiFe(3),
[0100] Here, the numbers in parentheses indicate the thickness (nm) of the film. After the formation of Ir and Al films, IrO and Al are formed by natural oxidation 2 o 3 membrane.
[0101] In Example Sample 1, CoPt and CoFe correspond to the magnetic film 106 shown in FIG. 1 . IrO corresponds to the nonmagnetic layer 104 for exchange coupling. CoFe corresponds to the magnetic film 105 . Al 2 o 3 Corresponds to the non-magnetic film 103 . CoFe and NiFe correspond to the free layer 101 .
[0102] A magnetoresistance effect device of 1 µm x 1 µm was formed from Example Sample 1 by photolithography. Al is used for the periphery of the magnetoresistance effect device 2 o 3 insulation and form a through hole. A Cu / Pt film was formed on the structure thus formed so that the thickness of the upper electrode was 50 nm. The magnetoresistance effect device thus fabricated was heat-...
Embodiment 2
[0106] Using Si as a substrate and Pt, Ru, PtMn, CoFe, Cu, Al, NiFe, NiFeCr as targets, the magnetoresistance effect device 200 shown in FIG. 2 was manufactured by sputtering. In Step 1, a Cu / Pt film with a thickness of 50 nm was formed on a Si substrate as a lower electrode. Next, a magnetoresistance effect device having the following structure was fabricated on the Cu / Pt film.
[0107] Example sample 2: PtMn(25) / CoFe(3) / RuO(0.8) / CoFe(3) / Al 2 o 3 (1.4) / CoFe(1) / NiFe(4),
[0108] In addition, a magnetoresistance effect device including a NiFeCr underlayer for the PtMn layer was fabricated.
[0109] Example Sample 2A: NiFeCr(4) / PtMn(25) / CoFe(3) / RuO(0.8) / CoFe(3) / Al 2 o 3 (1.4) / CoFe(1) / NiFe(4),
[0110] For comparison, a sample having a conventional structure as shown below was produced.
[0111] Conventional sample A: PtMn(25) / CoFe(6) / Al 2 o 3 (1.2) / CoFe(1) / NiFe(4).
[0112] In Example Sample 2, PtMn corresponds to the antiferromagnetic layer 201 shown in FIG. 2 . CoFe...
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Abstract
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