Film piezoelectric element and making method thereof and actuator device using same

Abstract

The present invention relates to a thin film piezoelectric element used in an actuator unit for fine positioning in particular, and its manufacturing method. In the manufacturing method, two piezoelectric thin films (53,57) held between electrode layers (52,54,56,58) are laminated by using adhesive (60), and only the second substrate is selectively removed in order to process the thin films remaining on the first substrate into a plurality of separated structures (70). After that, an insulating layer (62) and external connecting electrode (75) are formed so as to cover the exposed surface of the structure, thereby forming a plurality of thin film piezoelectric elements. Also, resin is applied to cover the thin film piezoelectric element, and a temporary fixing substrate is bonded thereto, and after selectively removing the first substrate, the temporary fixing substrate is separated, and the resin is removed from the piezoelectric element surface in order to separate the plurality of thin film piezoelectric elements. According to this manufacturing method, it is possible to provide thin film piezoelectric elements which are inexpensive and excellent in mass-production feasibility.

Description

technical field [0001] The present invention relates to a thin-film piezoelectric element used as an actuator or sensor for fine position determination, a manufacturing method thereof, and an actuator device using the thin-film piezoelectric element. Background technique [0002] In recent years, with the advancement of semiconductor technology, efforts have been made to fabricate mechanical structures using semiconductor manufacturing technology and achieve significant miniaturization, and electromechanical conversion elements such as actuators have emerged. Such elements can realize small-sized high-precision mechanical parts, and their productivity has been greatly improved by using semiconductor processes. In particular, microactuators using piezoelectric elements are used in micropositioning actuators such as microdisplacement elements of scanning tunneling microscopes and head sliders of magnetic disk recording and reproducing devices. [0003] For example, in a magne...

AI Technical Summary

Problems solved by technology

However, in this manufacturing method, since the external electrodes are formed from the two side surfaces of the laminate on which the piezoelectric components are laminated via the insulating layer, it is necessary to form the external electrodes at least for each laminate, which poses a problem in terms of mass productivity.

As a structure that produces displacement in the vertical direction to the substrate surface, such as a micro actuator of the head slider of a magnetic disk recording and reproducing device, there is a problem that it is a shape that is not suitable for use in the in-plane direction

However, in this manufacturing method, separate components are bonded together. In this way, it is difficult to position the components on the component transfer substrate with high precision and attach them separately. The smaller the size and the greater the number of electrode terminals, The more the misalignment with the electrode formation substrate becomes a problem

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