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Device and method for tempering several process goods

A treatment and annealing technology, used in heat treatment furnaces, heat treatment equipment, lighting and heating equipment, etc., can solve problems such as damage to treatment objects, and achieve the effect of achieving heating rate and improving temperature uniformity.

Inactive Publication Date: 2007-04-04
壳牌再生能源有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Temperature inhomogeneities can lead to mechanical stress in the process and thus to destruction of the process

Method used

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  • Device and method for tempering several process goods
  • Device and method for tempering several process goods
  • Device and method for tempering several process goods

Examples

Experimental program
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Effect test

Embodiment Construction

[0126] The starting point is an apparatus 1 ( FIG. 1 ) for annealing various treatments 33 and 43 . The device described consists of a plurality of tempering units 3 and 4 arranged one above the other to form a tempering stack 2 . A tempering unit 3 or 4 has an energy source 32 or 42 . For annealing the treatment material, the energy source and the treatment material are arranged so close to each other that the treatment material 33 is arranged between the energy source 32 and the other energy source 42 in a certain stack direction 22 of the annealing stack 2 , whereas The further energy source 42 described is arranged between the processed object 33 and the further processed object 43 .

[0127] In one implementation the energy sources 32 or 42 are rod-shaped halogen lamps 61 arranged in an array 64 (FIG. 6). Each of the halogen lamps 6 of the array 64 is arranged in an envelope 60 made of quartz glass. A liquid or gaseous coolant 62 flows through the interspace between en...

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Abstract

The invention relates to a device for simultaneously tempering and processing several process goods by means of electromagnetic radiation. The device is a batch-type furnace. The process goods and the energy sources are arranged adjacent to each other in such a way that a process good is situated between two energy sources and an energy source is situated between two process goods. The device is especially useful for tempering the process goods in the presence of a process gas. A variable heating and cooling profile having variable processing parameters (e.g. gas pressure, heating rate, cooling rate) can be obtained using the inventive device. It is especially possible to securely temper a process good in the form of a large-surface multilayer body comprising layers of different physical characteristics (thermal conductivity coefficient, temperature expansion coefficient, absorption and emission capacity, etc.). According to the inventive method and device, a toxic and / or corrosive process gas can be used for processing the process good. The device and the method are useful for producing thin film solar modules for instance.

Description

technical field [0001] The invention relates to a device for tempering a material and a corresponding method for tempering a material. Background technique [0002] Such a device is known, for example, from EP 0 662 247 B1. [0003] The process known from EP 0 662 247 B1 is a multilayer body which is produced by applying a functional layer to a carrier layer (substrate). In order for the functional layer and / or carrier layer to have a desired physical (electrical, mechanical, etc.) and / or chemical property, the treatment or layer and / or carrier layer is subjected to a treatment. The treatment includes annealing of the treatment object in the presence of a gas (processing gas). [0004] For annealing, the treatment is arranged in a closed annealing vessel made of graphite. The process is subjected to a process gas with gaseous selenium during the anneal. The treatment substances absorb an energy during annealing, a portion of the energy being delivered to each layer. For...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L21/324H01L21/477C21D9/00F27B5/04C21D1/34C21D1/74F27B5/14F27B5/16
CPCC21D9/00C21D1/74C21D1/34H01L31/1864Y02E10/50H01L21/324Y02P70/50
Inventor V·普罗布斯特
Owner 壳牌再生能源有限责任公司
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